Ion beam irradiation apparatus and program therefor
AssigneeNissin Ion Equipment Co., Ltd.
InventorShinya Takemura
Life of this patent
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Abstract
An ion beam irradiation apparatus includes modules for generating an ion beam according to a recipe, and a control device. The control device receives the recipe including a processing condition for new processing, reads, from a monitored value storage, a monitored value that indicates a state of a module during a last processing immediately before the new processing, inputs the processing condition and the monitored value to a trained machine learning algorithm and receives, as an output from the trained machine learning algorithm, an initial value for the module, and outputs the initial value to the module to set up the module for generating the ion beam.
Claims20
An ion beam irradiation apparatus comprising:
- a plurality of modules for generating an ion beam according to a recipe;
- and
- a control device configured to:
- receive the recipe including a processing condition for new processing,
- read, from a monitored value storage, a monitored value that indicates a state of a module of the plurality of modules during a last processing immediately before the new processing;
- input the processing condition and the monitored value to a trained machine learning algorithm and receive, as an output from the trained machine learning algorithm, an initial value for the module, and
- output the initial value to the module to set up the module for generating the ion beam.
A non-transitory computer readable storage medium storing program code which, when executed by at least one central processing unit (CPU) of an ion beam irradiation apparatus that includes a plurality of modules for generating an ion beam according to a recipe, causes the CPU to:
- receive the recipe including a processing condition for new processing,
- read a monitored value that indicates a state of a module of the plurality of modules during a last processing immediately before the new processing;
- input the processing condition and the monitored value to a trained machine learning algorithm and receive, as an output from the trained machine learning algorithm, an initial value for the module, and
- output the initial value to the module to set up the module for generating the ion beam.
A system comprising:
- a plurality of ion implanters, each ion implanter comprising a plurality of modules and each ion implanter configured to:
- setup at least one module of the plurality of modules according to an initial value obtained from a trained machine learning algorithm based on a processing condition for a new processing and a monitored value that indicates a state of the at least one module during a last processing immediately before the new processing, and
- store learning data including the processing condition, the initial value, and an adjusted value obtained by adjusting the initial value during the setup, in association with each other;
- and
- an off-site device communicatively coupled to the plurality of the ion implanters, the off-site device configured to receive the learning data from at least one of the plurality of ion implanters and update the trained machine learning algorithm based on the learning data.
Dependencies are inferred from the claim text.