Optical phased array, method for improving reducing a phase error thereof, LiDAR, and intelligent apparatus

An optical phased array, comprising an optical signal output unit, a waveguide unit, and an antenna transmitting unit, wherein:

• the optical signal output unit comprises an optical splitter and a phase shifter, and the optical signal output unit is configured to output M modulated optical signals of different phases, wherein M is a positive integer;
• the waveguide unit comprises M waveguide pipes for respectively transmitting the M optical signals, and each waveguide pipe of the M waveguide pipes comprises a plurality of connection waveguides and at least one curved waveguide,
• wherein each connection waveguide comprises an input mode converter, a wide waveguide, and an output mode converter that are connected in sequence, wherein the input mode converter is configured to convert a first waveguide width into a second waveguide width of the wide waveguide, the second waveguide width is in a range of 800 nm to 1 μm, the output mode converter is configured to convert the second waveguide width into the first waveguide width, an input end of an input mode converter of one of the plurality of connection waveguides is connected with the optical signal output unit, and an output end of an output mode converter of one of the plurality of connection waveguides is connected with the antenna transmitting unit;
• wherein, in each waveguide pipe, one curved waveguide is arranged between adjacent two connection waveguides, and each curved waveguide is configured to connect the output mode converter of one of the adjacent two connection waveguides with the input mode converter of the other of the adjacent two connection waveguides, a width of each curved waveguide is equal to the first waveguide width, and each curved waveguide is configured to bend the waveguide pipe, wherein the width of each curved waveguide is in a range of 150 nm to 500 nm;
• and
• the antenna transmitting unit is connected with the waveguide unit and is configured to transmit the M optical signals outputted from the waveguide unit.