Large radius probe
AssigneeBruker Nano, Inc.
InventorJeffrey Wong
Life of this patent
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Abstract
A large radius probe for a surface analysis instrument such as an atomic force microscope (AFM). The probe is microfabricated to have a tip with a hemispherical distal end or apex. The radius of the apex is the range of about a micron making the probes particularly useful for nanoindentation analyses, but other applications are contemplated. In particular, tips with aspect ratios greater than 2:1 can be made for imaging, for example, semiconductor samples. The processes of the preferred embodiments allow such large radius probes to be batch fabricated to facilitate cost and robustness.
Claims14
An AFM probe microfabricated by a process comprising the steps of:
- providing a substrate;
- forming an array of cylindrical posts from the substrate;
- depositing tip material on the posts so as to create a hemispherical cap on each post;
- removing the tip material around the cap to form a tip wherein the hemispherical cap has a radius greater than ¼ μm;
- and
- forming a cantilever for each cap, wherein the tip is a high aspect ratio tip with a height to width ratio of at least 2:1.
Dependencies are inferred from the claim text.