Method for setting an airborne molecular contamination measurement station, and measurement station
AssigneePfeiffer Vacuum GmbH
InventorsJulien Bounouar, Olivier Le Barillec, Nicolas Chapel
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AssigneePfeiffer Vacuum GmbH
InventorsJulien Bounouar, Olivier Le Barillec, Nicolas Chapel
Estimating the term…
A setting method includes setting the conductances of the controllable restrictions of an airborne molecular contamination measurement station. The setting method includes an initial identification step, prior to the carrying-out of an airborne molecular contamination measurement step, and during which the sampling line that has the lowest conductance when the conductance of the controllable restriction of the said sampling line is set to its maximum value is determined, and an initial conductance-setting step prior to the carrying-out of the measurement step and after the initial identification step, and during which the conductances of the controllable restrictions are set to make them correspond to the lowest conductance determined in the initial identification step. Further, a measurement station is provided for measuring airborne molecular contamination.
A setting method for setting conductances of controllable restrictions of an airborne molecular contamination measurement station, the measurement station includes at least one gas analyser, and at least two sampling lines which are connected to a common line which is connected to an inlet of the at least one gas analyser, each sampling line comprising a controllable restriction having a conductance that can be set between a minimum value and a maximum value, the setting method comprising:
Dependencies are inferred from the claim text.