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US 11,953,417 B2Granted
Oscillator apparatus
AssigneeNokia Technologies Oy
InventorsJohn D. Kim, Flavio Pardo, Sina Moradian
Life of this patent
Estimating the term…
Abstract
An apparatus comprising, a monolithic crystal comprising a substrate portion and at least one oscillator; a first electrode provided at a first location of the oscillator; a second electrode provided at a second location of the oscillator; a gap separating the oscillator from the substrate portion, exposing a side surface of the oscillator; and one or more tethers that extend across the gap so that the oscillator is supported by the substrate portion.
Claims19
An apparatus comprising,
- a monolithic crystal comprising a substrate portion and at least one oscillator;
- a first electrode provided at a first location of the oscillator;
- a second electrode provided at a second location of the oscillator;
- a gap separating the oscillator from the substrate portion, exposing a side surface of the oscillator;
- and
- one or more tethers that extend across the gap so that the oscillator is supported by the substrate portion;
- wherein the apparatus is configured to enable an analyte to enter the gap;
- and
- wherein the side surface is functionalized to enable the analyte to accumulate on the side surface of the oscillator.
6 more elements
A transducer array comprising an apparatus, the apparatus comprising:
- a monolithic crystal comprising a substrate portion and at least one oscillator;
- a first electrode provided at a first location of the oscillator;
- a second electrode provided at a second location of the oscillator;
- a gap separating the oscillator from the substrate portion, exposing a side surface of the oscillator;
- and
- one or more tethers that extend across the gap so that the oscillator is supported by the substrate portion;
- wherein the apparatus is configured to enable an analyte to enter the gap;
- wherein the side surface is functionalized to enable the analyte to accumulate on the side surface of the oscillator;
- and
- wherein the monolithic crystal comprises an array of oscillators including the oscillator,
- wherein a first array of electrodes includes the first electrode, and
- wherein a second array of electrodes includes the second electrode.
9 more elements
A method comprising:
- providing a monolithic crystal comprising a substrate portion;
- providing a first electrode at a first location of the monolithic crystal;
- providing a second electrode at a second location of the monolithic crystal;
- providing a gap through a thickness of the monolithic crystal to define an oscillator, the gap exposing a side surface of the oscillator, wherein the first location and the second location are locations on the oscillator;
- and
- providing one or more tethers that extend across the gap so that the oscillator is supported by the substrate portion;
- wherein the gap is configured to enable an analyte to enter the gap;
- and
- wherein the side surface is functionalized to enable the analyte to accumulate on the side surface of the oscillator.
6 more elements
Dependencies are inferred from the claim text.