Backpressure monitoring apparatus
AssigneeApplied Materials, Inc.
InventorsSukti Chatterjee, David Masayuki Ishikawa, Yuriy V. Melnik, David A. Britz, Lance A. Scudder
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Abstract
Exemplary backpressure monitoring apparatuses may include a fluid supply source having a fluid port. The backpressure monitoring apparatuses may include a flow control mechanism fluidly coupled with the fluid port. The backpressure monitoring apparatuses may include a delivery tube fluidly coupled with the flow control mechanism and the fluid port. The backpressure monitoring apparatuses may include a pressure differential gauge fluidly coupled with the delivery tube. The pressure differential gauge may include an interface mechanism that is engageable with an outlet of a fluid flow device.
Claims14
A method of monitoring backpressure in a fluid flow device, comprising:
- introducing a fluid through a flow control mechanism, wherein the fluid is at a fixed flow rate;
- flowing the fluid through an inlet of a nozzle;
- measuring a pressure differential between the inlet and a spray outlet of the nozzle;
- measuring a difference between the pressure differential and a baseline pressure differential that is indicative of flow through a new nozzle;
- and
- determining whether flow conductance is reduced through the nozzle based on the difference between the pressure differential and the baseline pressure differential.
A method of monitoring backpressure in a fluid flow device, comprising:
- flowing a fluid through an inlet of a fluid flow device;
- measuring a pressure differential between the inlet and a spray outlet of the fluid flow device;
- measuring a difference between the pressure differential and a baseline pressure differential that is indicative of flow through a new fluid flow device;
- and
- determining whether flow conductance is reduced through the fluid flow device based on the difference between the pressure differential and the baseline pressure differential.
Dependencies are inferred from the claim text.