Gyro sensor, electronic device, and vehicle
AssigneeSeiko Epson Corporation
InventorTeruo Takizawa
Life of this patent
Estimating the term…
Abstract
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a mass section coupled to the driving section and displaced along the X axis, a detecting section coupled to the mass section, capable of turning around a Z axis crossing the X axis, and capable of being displaced along the Z axis by a Coriolis force acting on a turning motion horizontal to the substrate, and an elastic section coupling the detecting section and the fixed section. The fixed section is disposed between the center of gravity of the detecting section and the mass section in a plan view.
Claims13
A gyro sensor comprising:
- three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
- a substrate;
- and
- an element unit that is supported on an upper surface of the substrate, is located on a plus side of the Z axis, and is configured to detect an angular velocity based on a change in capacitance, wherein
- the element unit comprises:
- a fixed section fixed to the upper surface of the substrate;
- a mass section configured to be displaced in an X-axis direction along the X-axis parallel to the upper surface of the substrate;
- a driving section that drives the mass section in the X-axis direction;
- a first detecting section that is connected to the mass section and is configured to be displaced in a Z-axis direction along the Z-axis;
- a second detecting section that is connected to the mass section and is configured to be displaced in the Z-axis direction;
- a first elastic section connecting the first detecting section and the fixed section;
- a second elastic section connecting the second detecting section and the fixed section;
- a first fixed detecting section facing the first detecting section and spaced apart from the first detecting section;
- and
- a second fixed detecting section facing the second detecting section and spaced apart from the second detecting section.
Dependencies are inferred from the claim text.