Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method

A micromechanical rate-of-rotation sensor array, comprising:

• a plurality of micromechanical rate-of-rotation sensor set-ups positioned in the form of an array and connected to each other, each of the micromechanical rate-of-rotation setups including:
• a first rate-of-rotation sensor device capable of being driven by a driving device via a drive frame device, so as to oscillate rotationally about a first axis, and is configured to measure a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis, the first, second, and third axes being positioned perpendicularly to each other;
• and
• a second rate-of-rotation sensor device capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the third axis, and is configured to measuring a third outer rate of rotation about the first axis;
• the first rate-of-rotation sensor device is connected to the second rate-of-rotation sensor device by the drive frame device;
• the drive frame device includes a first drive frame and a second drive frame, which are capable of being driven in phase opposition by the driving device along the third axis in an oscillatory manner;
• the first rate-of-rotation sensor device is capable of being driven rotationally and includes:
• a first rotor device which may be driven about the first axis in an oscillatory manner,
• a second rotor device which may be driven in an oscillatory manner about the first axis in phase opposition to the first rotor device,
• the first rotor device is tiltable due to the first outer rate-of-rotation about the second axis, and due to the second outer rate-of-rotation about the third axis, and the second rotor device is tiltable antiparallelly to the first rotor device, due to the first outer rate-of-rotation about the second axis and the second outer rate-of-rotation about the third axis;
• a first coupling device which has a first spring device, by which the first rotor device and the second rotor device are coupled in such a manner, that parallel tilting about the second axis is suppressed and antiparallel tilting about the second axis is enabled;
• a second coupling device by which the first rotor device and the second rotor device are coupled in such a manner, that parallel tilting about the third axis is suppressed and antiparallel tilting about the third axis is enabled;
• a first detection device configured to measure antiparallel tilting of the first and second rotor devices about the second axis;
• and
• a second detection device configured to measure antiparallel tilting of the first and second rotor devices about the third axis;
• wherein the second coupling device has first, second, and third rocker arms, the first rocker arm being connected to the first rotor device and to the first drive frame by spring devices, the second rocker arm being connected to the second rotor device and to the second drive frame by spring devices, and the first and second rocker arms each being connected to the third rocker arm by spring devices;
• and
• wherein the second coupling device has fourth, fifth, and sixth rocker arms, the fourth rocker arm being connected to the first rotor device and to the first drive frame by spring devices, the fifth rocker arm being connected to the second rotor device and to the second drive frame by spring devices, and the fourth and fifth rocker arms being connected to the sixth rocker arm by spring devices, respectively.

A method of manufacturing a micromechanical rate-of-rotation sensor set-up, comprising the following steps:

• forming a drive frame device which includes a first drive frame and a second drive frame, which are drivable by a driving device in phase opposition, along the third axis, in an oscillatory manner;
• forming a first rate-of-rotation sensor device which is capable of being driven rotationally by the driving device via the drive frame device, so as to oscillate about a first axis, and is configured to measure a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis, the first, second, and third axes being positioned perpendicularly to each other;
• forming a second rate-of-rotation sensor device which is capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the third axis, and is configured to measure a third outer rate of rotation about the first axis;
• and
• connecting the first rate-of-rotation sensor device to the second rate-of-rotation sensor device via the drive frame device;
• the first rate-of-rotation sensor device capable of being driven rotationally including:
• a first rotor device which may be driven about the first axis in an oscillatory manner;
• a second rotor device which may be driven in an oscillatory manner about the first axis in phase opposition to the first rotor device;
• the first rotor device being tiltable due to the first outer rate-of-rotation about the second axis, and due to the second outer rate-of-rotation about the third axis, and the second rotor device being tiltable antiparallelly to the first rotor device, due to the first outer rate-of-rotation about the second axis and the second outer rate-of-rotation about the third axis;
• a first coupling device, which has a first spring device, by which the first rotor device and the second rotor device are coupled in such a manner, that parallel tilting about the second axis is suppressed and antiparallel tilting about the second axis is enabled;
• a second coupling device, by which the first rotor device and the second rotor device are coupled in such a manner, that parallel tilting about the third axis is suppressed and antiparallel tilting about the third axis is enabled;
• a first detection device configured to measure antiparallel tilting of the first and second rotor devices about the second axis;
• and
• a second detection device configured to measure antiparallel tilting of the first and second rotor devices about the third axis;
• wherein:
• the second coupling device has first, second, and third rocker arms, the first rocker arm being connected to the first rotor device and to the first drive frame by spring devices, the second rocker arm being connected to the second rotor device and to the second drive frame by spring devices, and the first and second rocker arms each being connected to the third rocker arm by spring devices;
• and
• the second coupling device has fourth, fifth, and sixth rocker arms, the fourth rocker arm being connected to the first rotor device and to the first drive frame by spring devices, the fifth rocker arm being connected to the second rotor device and to the second drive frame by spring devices, and the fourth and fifth rocker arms being connected to the sixth rocker arm by spring devices, respectively.