Powder atomic layer deposition equipment with quick release function

A powder atomic layer deposition equipment with a quick release function, comprising:

• a driving unit;
• a shaft sealing device comprising an outer tube and an inner tube, the outer tube including an accommodating space for accommodating the inner tube, and the inner tube including at least one connecting space, wherein part of the inner tube protrudes from the outer tube;
• a vacuum chamber comprising a recessed part located at a bottom of the vacuum chamber, the recessed part being used for accommodating said part of the inner tube protruding from the outer tube, with an enclosed space formed between the inner tube of the shaft sealing device and the recessed part of the vacuum chamber, wherein the vacuum chamber includes a reaction space for accommodating a plurality of powders, and the driving unit is connected to and rotates the vacuum chamber via the outer tube of the shaft sealing device;
• at least one first seal ring and at least one second seal ring, located between the shaft sealing device and the vacuum chamber, wherein the enclosed space is located between the at least one first seal ring and the at least one second seal ring;
• at least one first air extraction line, located in the shaft sealing device and fluidly connected to the enclosed space, wherein the at least one first air extraction line is used in pumping gas out from the enclosed space to fix the vacuum chamber to the shaft sealing device;
• and
• at least one air intake line, located in the shaft sealing device and fluidly connected to the reaction space of the vacuum chamber, for delivering a precursor gas into the reaction space.