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US 11,952,471 B2Granted
Ultrathin and stretchable polymer dielectric and its formation method
AssigneeKorea Advanced Institute of Science and Technology
InventorsSungGap Im, Juyeon Kang, Junhwan Choi
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Abstract
A polymer thin film having stretchability and dielectric properties and a method of forming the same are provided. The method includes forming the polymer thin film having stretchability and dielectric properties depending on a composition of a copolymer using an acrylate-based monomer and a vinyl group monomer.
Claims5
A method of forming a polymer thin film, the method comprising:
- providing an acrylate-based monomer and a vinyl group monomer for forming the polymer thin film, wherein the acrylate-based monomer comprises an aliphatic hydrocarbon chain having 8 or more carbons and a linear structure;
- selecting a ratio of the acrylate-based monomer to the vinyl group monomer, wherein the ratio determines desired stretchability and dielectric properties of the polymer thin film;
- and
- forming the polymer thin film by copolymerizing the acrylate-based monomer and the vinyl group monomer using said selected ratio and an initiated chemical vapor deposition (iCVD) method, wherein the polymer thin film has said desired stretchability and dielectric properties.
1 more element
Dependencies are inferred from the claim text.