Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
AssigneeVersum Materials US, LLC
InventorsManchao Xiao, Matthew R. MacDonald, Xinjian Lei, Meiliang Wang
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Abstract
Amino-functionalized linear and cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized linear and cyclic oligosiloxanes are also disclosed.
Claims5
A method for making an organoamino-functionalized oligosiloxane compound selected from the group consisting of Formulae A and B:
- the method comprising the steps of:
- reacting a cyclotrisiloxane of Formula (i) or a cyclotetrasiloxane compound of Formula (iii) with an organoamine in the presence of a catalyst as shown in equations (1) or (3):
- wherein
- R1 is selected from a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 heterocyclic group, a C3 to C10 alkenyl group, a C3 to C10 alkynyl group, and a C4 to C10 aryl group;
- R2 is selected from the group consisting of hydrogen, a C1 to C10 linear alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 heterocyclic group, a C3 to C10 alkenyl group, a C3 to C10 alkynyl group, and a C4 to C10 aryl group, wherein R1 and R2 are either linked to form a cyclic ring structure or are not linked to form a cyclic ring structure;
- and
- R3-9 are each independently selected from hydrogen, a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C2 to C10 alkenyl group, a C2 to C10 alkynyl group, and a C4 to C10 aryl group.
A method for making an organoamino-functionalized oligosiloxane compound selected from the group consisting of Formulae A and B:
- the method comprising the steps of:
- reacting a chlorinated cyclotrisiloxane of Formula (ii) or a chlorinated cyclotetrasiloxane compound of Formula (iv) with an organoamine or metal salt of an organoamine in the presence of a catalyst as shown in equations (2) or (4):
- wherein
- R1 is selected from a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 heterocyclic group, a C3 to C10 alkenyl group, a C3 to C10 alkynyl group, and a C4 to C10 aryl group;
- R2 is selected from the group consisting of hydrogen, a C1 to C10 linear alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 heterocyclic group, a C3 to C10 alkenyl group, a C3 to C10 alkynyl group, and a C4 to C10 aryl group, wherein R1 and R2 are either linked to form a cyclic ring structure or are not linked to form a cyclic ring structure;
- and
- R3-9 are each independently selected from hydrogen, a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C2 to C10 alkenyl group, a C2 to C10 alkynyl group, and a C4 to C10 aryl group, provided that R4, R6, and R8 are hydrogen.
Dependencies are inferred from the claim text.