Substrate joined body
AssigneeCanon Kabushiki Kaisha
InventorsTaichi Yonemoto, Yoshiyuki Fukumoto, Atsunori Terasaki
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Abstract
A substrate joined body including: a first substrate; a second substrate; an organic film that comprises silicon and carbon and joins the first substrate and the second substrate; and a protective film that comprises an inorganic element and is formed over the organic film from at least a part of the surface of the first substrate and at least a part of the surface of the second substrate, wherein the protective film comprises a region in which the ratio of carbon to silicon based on atomic percentage is from 0.0 to 5.0 in a region within 50 nm in a thickness direction from a surface of the organic film on the protective film side, when the surface is measured by X-ray photoelectron spectroscopy.
Claims13
A substrate joined body comprising:
- a first substrate;
- a second substrate;
- an organic film that comprises silicon and carbon, and the organic film joins the first substrate and the second substrate;
- and
- a protective film that comprises an inorganic element, and the protective film is formed over the organic film from at least a part of a surface of the first substrate and at least a part of a surface of the second substrate,
- wherein the organic film comprises a region in which a ratio of carbon to silicon based on atomic percentage is from 0.0 to 5.0 in a region within 50 nm in a thickness direction from a surface of the organic film on a side of the protective film, when the surface is measured by X-ray photoelectron spectroscopy.
A structure comprising:
- a substrate;
- an organic film that is present on the substrate and comprises silicon and carbon;
- and
- a protective film that comprises an inorganic element, and the protective film is formed on the organic film, wherein
- the organic film comprises a region in which a ratio of carbon to silicon based on atomic percentage is from 0.0 to 5.0 in a region within 50 nm in a thickness direction from a surface of the organic film on a side of the protective film, when the surface is measured by X-ray photoelectron spectroscopy.
A method for manufacturing a substrate joined body comprising:
- a first substrate;
- a second substrate;
- an organic film that comprises silicon and carbon, and the organic film joins the first substrate and the second substrate;
- and
- a protective film that comprises an inorganic element, and the protective film is formed over the organic film from at least a part of a surface of the first substrate and at least a part of a surface of the second substrate,
- the manufacturing method comprising:
- a step of joining the first substrate and the second substrate with the organic film being interposed therebetween;
- a carbon amount reduction step of forming a region in which a ratio of carbon to silicon based on atomic percentage is from 0.0 to 5.0 in a region within 50 nm in a thickness direction from a surface of the organic film on a side of the protective film, when the surface is measured by X-ray photoelectron spectroscopy;
- and
- a step of forming the protective film on the organic film over a region where the first substrate and the second substrate are joined.
A liquid discharge head comprising:
- a substrate joined body comprising
- a first substrate;
- a second substrate;
- an organic film that comprises silicon and carbon, and the organic film joins the first substrate and the second substrate;
- and
- a protective film that comprises an inorganic element, and the protective film is formed over the organic film from at least a part of a surface of the first substrate and at least a part of a surface of the second substrate;
- and
- a discharge port forming member comprises a top plate on which a wall and a discharge port is formed, wherein
- the first substrate further comprises an energy generating element, and
- wherein the organic film comprises a region in which a ratio of carbon to silicon based on atomic percentage is from 0.0 to 5.0 in a region within 50 nm in a thickness direction from a surface of the organic film on a side of the protective film, when the surface is measured by X-ray photoelectron spectroscopy.
Dependencies are inferred from the claim text.