Optical film-thickness measuring apparatus and polishing apparatus

An optical film-thickness measuring apparatus to be installed in a polishing apparatus for a workpiece, comprising:

• a light source;
• a light-emitting optical fiber cable coupled to the light source;
• a light-receiving optical fiber cable arranged to receive light reflected from the workpiece;
• a spectrometer configured to measure intensity of the reflected light at each of the wavelengths of the reflected light;
• a data processing device configured to calculate a film thickness of the workpiece from measurement data of the intensity of the reflected light;
• a first cable housing having a circular cross section, the first cable housing surrounding the light-emitting optical fiber cable and the light-receiving optical fiber cable;
• a flow-passage structure defining a fluid passage adjacent to the light-emitting optical fiber cable and the light-receiving optical fiber cable, the light-emitting optical fiber cable and the light-receiving optical fiber cable being supported by the first cable housing and the flow-passage structure, the light-emitting optical fiber cable comprising a bundle fiber cable including multiple fiber cables which are arranged around the light-receiving optical fiber cable;
• and
• a second cable housing surrounding the light-emitting optical fiber cable, the light-receiving optical fiber cable, and the first cable housing.

An optical film-thickness measuring apparatus to be installed in a polishing apparatus for a workpiece, comprising:

• a light source;
• a light-emitting optical fiber cable coupled to the light source;
• a light-receiving optical fiber cable arranged to receive light reflected from the workpiece;
• a spectrometer configured to measure intensity of the reflected light at each of the wavelengths of the reflected light;
• a data processing device configured to calculate a film thickness of the workpiece from measurement data of the intensity of the reflected light;
• a first cable housing having a circular cross section, the first cable housing surrounding the light-emitting optical fiber cable and the light-receiving optical fiber cable;
• a flow-passage structure defining a fluid passage adjacent to the light-emitting optical fiber cable and the light-receiving optical fiber cable, the light-emitting optical fiber cable and the light-receiving optical fiber cable being supported by the first cable housing and the flow-passage structure, the light-receiving optical fiber cable comprising a bundle fiber cable including multiple fiber cables which are arranged around the light-emitting optical fiber cable;
• and
• a second cable housing surrounding the light-emitting optical fiber cable, the light-receiving optical fiber cable, and the first cable housing.