Electrostatic chuck with high insulation performance and electrostatic attraction force
AssigneeNGK Insulators, Ltd.
InventorsHiroshi Takebayashi, Kenichiro Aikawa, Tatsuya Kuno
Life of this patent
Estimating the term…
Abstract
An electrostatic chuck includes a ceramic base, a ceramic dielectric layer, an electrostatic electrode, and a ceramic insulating layer. The ceramic dielectric layer is positioned on the ceramic base and is thinner than the ceramic base. The electrostatic electrode is embedded between the ceramic dielectric layer and the ceramic base. The ceramic insulating layer is positioned on the ceramic dielectric layer and is thinner than the ceramic dielectric layer. The ceramic insulating layer has a higher volume resistivity and withstand voltage than the ceramic dielectric layer, and the ceramic dielectric layer has a higher dielectric constant than the ceramic insulating layer.
Claims4
An electrostatic chuck comprising:
- a ceramic base;
- a ceramic dielectric layer positioned on the ceramic base and being thinner than the ceramic base;
- an electrostatic electrode embedded between the ceramic dielectric layer and the ceramic base;
- and
- a ceramic insulating layer positioned on the ceramic dielectric layer and being thinner than the ceramic dielectric layer,
- wherein the ceramic insulating layer has a higher volume resistivity and withstand voltage than the ceramic dielectric layer and is an aerosol deposition film, and
- the ceramic dielectric layer has a higher dielectric constant than the ceramic insulating layer;
- and
- wherein the aerosol deposition film is void of a glass base with low insulation at grain boundaries between raw material grains.
Dependencies are inferred from the claim text.