Piezoelectric micromachined ultrasonic transducer sensor apparatuses, systems, and methods

An ultrasonic transducing sensor apparatus compromising

• a receive sensor;
• at least one PMUT mechanically coupled to, and electrically isolated from, the receive sensor via a common flexible membrane, the at least one PMUT to transmit an acoustic waveform via the membrane in response to a drive voltage Vd(t) and receive a waveform via the membrane, and the receive sensor to receive waveforms via the membrane and provide a feedback signal based on a received waveform, VRO(t), and
• at least one processor configured to provide the drive voltage Vd(t) to the at least one PMUT and modify the drive voltage Vd(t) based on the feedback signal, and modify the drive voltage Vd(t) to minimize a closed loop weighted (α, β) sum of the energy of VRO(t) and the blind zone duration.

An ultrasonic transducing sensor apparatus comprising

• a receive sensor;
• at least one PMUT mechanically coupled to, and electrically isolated from, the receive sensor via a common flexible membrane, the at least one PMUT to transmit an acoustic waveform via the membrane in response to a drive voltage Vd(t), and
• at least once processor configured to provide the drive voltage Vd(t) to the at least one PMUT and modify the drive voltage Vd(t) based on the feedback signal, where the receive sensor is an optical vibration sensor including an optical waveguide and the received waveform, VRO(t), is based on the physical displacement of the optical waveguide by the common membrane.