Broadband active mirror architecture for high power optically pumped semiconductor disk lasers
OwnerMansoor Sheik-Bahae, Alexander Robert Albrecht +1inventors
InventorsMansoor Sheik-Bahae, Alexander Robert Albrecht, Zhou Yang
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Abstract
A vertical-external-cavity surface-emitting laser (VECSEL) and a method of forming the VECSEL is disclosed. The VECSEL includes a heat sink; a heat spreader or heat spreader formed on a top surface of the heat sink, where the heat spreader comprises a first material having a first refractive index; and a high contrast grating formed on a top surface of the heat spreader or active region, wherein the high contrast grating comprises an active region and the high contrast grating comprising a second material having a second refractive index, the second refractive index is greater than the first refractive index.
Claims19
A vertical-external-cavity surface-emitting laser (VECSEL) comprising:
- a heat sink;
- a heat spreader formed on a top surface of the heat sink, wherein the heat spreader comprises a first material having a first refractive index;
- a semiconductor active region formed on a top surface of the heat spreader, wherein the semiconductor active region comprises a second material having a second refractive index;
- and
- a high contrast grating formed on a top surface of the semiconductor active region, wherein the high contrast grating comprises a third material having a third refractive index, wherein a period, a fill factor, an etch depth, and an index of refraction of the high contrast grating are optimized such that a zero-order diffraction from the high contrast grating is minimized and higher diffraction orders transmitted to allow for total internal reflection at an interface of the heat spreader,
- wherein the second refractive index is greater than the first refractive index and a fourth refractive index, wherein the fourth refractive index represents a medium that a pump laser beam propagates through that is incident on the high contrast grating.
A method of forming a vertical-external-cavity surface-emitting laser (VECSEL), the method comprising:
- bonding a heat spreader to a top surface of a heat sink, where the heat spreader comprises a first material having a first refractive index;
- bonding an active region to a top surface of the heat spreader, wherein the active region comprises a second material having a second refractive index;
- and
- forming a high contrast grating on a top surface of the active region, wherein the high contrast grating comprises a third material having a third refractive index, wherein the second refractive index is greater than the first refractive index and a fourth refractive index, wherein the fourth refractive index represents a medium that a pump laser beam propagates through that is incident on the high contrast grating, and
- wherein a period, a fill factor, an etch depth, and an index of refraction of the high contrast grating are optimized such that a zero-order diffraction from the high contrast grating is minimized and higher diffraction orders transmitted to allow for total internal reflection at an interface of the heat spreader.
A vertical-external-cavity surface-emitting laser (VECSEL) comprising:
- a heat spreader, wherein the heat spreader comprises a first material having a first refractive index and wherein the heat spreader is cooled via direct contact with a cooling medium;
- a semiconductor active region formed on a top surface of the heat spreader, wherein the semiconductor active region comprises a second material having a second refractive index;
- and
- a high contrast grating formed on a top surface of the semiconductor active region, wherein the high contrast grating comprises a third material having a third refractive index, wherein a period, a fill factor, an etch depth, and an index of refraction of the high contrast grating are optimized such that a zero-order diffraction from the high contrast grating is minimized and higher diffraction orders transmitted to allow for total internal reflection at an interface of the heat spreader,
- wherein the second refractive index is greater than the first refractive index and a fourth refractive index, wherein the fourth refractive index represents a medium that a pump laser beam propagates through that is incident on the high contrast grating.
Dependencies are inferred from the claim text.