Systems and methods for providing getters in microelectromechanical systems
AssigneeInvenSense, Inc.
InventorsDaesung Lee, Jeff Chunchieh Huang, Jongwoo Shin, Bongsang Kim, Logeeswaran Veerayah Jayaraman
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Abstract
Systems and methods are provided that provide a getter in a micromechanical system. In some embodiments, a microelectromechanical system (MEMS) is bonded to a substrate. The MEMS and the substrate have a first cavity and a second cavity therebetween. A first getter is provided on the substrate in the first cavity and integrated with an electrode. A second getter is provided in the first cavity over a passivation layer on the substrate. In some embodiments, the first cavity is a gyroscope cavity, and the second cavity is an accelerometer cavity.
Claims10
A method, comprising:
- bonding a microelectromechanical system (MEMS) wafer to a second wafer the MEMS wafer and the second wafer having a first cavity and a second cavity therebetween and
- providing:
- a getter layer in the first cavity over a passivation layer on the second wafer, wherein the providing the getter layer further comprises:
- depositing a conductive layer over the getter layer;
- patterning the conductive layer and the getter layer;
- and
- etching the conductive layer and, by the etching the conductive layer:
- exposing a first surface of the getter layer;
- and
- exposing a second surface of the getter layer, wherein the first surface and the second surface are adjacent sides of the getter layer.
A method, comprising:
- depositing and patterning a getter layer over a passivation layer, wherein the passivation layer is disposed over a semiconductor layer;
- depositing a conductive layer over the getter layer;
- and
- etching the conductive layer to expose a first portion and a second portion of the getter layer, the first portion adjacent the second portion, the conductive layer overlaps the first portion of the getter layer, wherein the conductive layer provides an electrical connection through the getter and a silicon rich oxide/silicon nitride layer to a metal layer.
Dependencies are inferred from the claim text.