Aperture device and analyzer arrangement
AssigneeScienta Omicron AB
InventorsPeter Amann, Anders Nilsson
Life of this patent
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AssigneeScienta Omicron AB
InventorsPeter Amann, Anders Nilsson
Estimating the term…
An aperture device (31) is described, which is attachable to a lens system (13). The lens system (13) is arranged to form a particle beam of charged particles, emitted from a sample surface (Ss). The aperture device (31) comprises an end surface (S) which is to be arranged facing the sample surface (Ss), at least one aperture (38) arranged in the end surface (S), a length axis (32) which extends through the centre of said at least one aperture (38), and at least one gas outlet (10), which is arranged at a transverse distance (T) perpendicular from the length axis (32), and is arranged to direct gas into a volume between at least one aperture (38) and the sample surface (Ss). The end surface (S) within a distance, equal to ⅓ of the transverse distance (T), perpendicular from the length axis (32) has a variation along the length axis (32) being smaller than ⅙ of the transverse distance (T).
An aperture device attachable to a lens system, comprising a first end, and a second end at a distance from the first end, wherein the lens system is arranged to form a particle beam of charged particles, emitted from a sample surface of a particle emitting sample, which enter the lens system at the first end and to transport the charged particles to the second end,
A method for forming a high pressure between an aperture to a lens system and a sample surface of a particle emitting sample, the lens system comprising a first end at which the aperture is arranged, and a second end at a distance from the first end, wherein the lens system is arranged to form a particle beam of charged particles, emitted from the sample surface, which enter at the first end and to transport the charged particles to the second end,
Dependencies are inferred from the claim text.