Airtight box for measurement, airtight apparatus, measurement system and measurement apparatus
AssigneeRigaku Corporation
InventorsKoichiro Ito, Tetsuya Ozawa, Takeshi Ozawa
Life of this patent
Estimating the term…
Abstract
An airtight apparatus in which an airtight box (30) for measurement is combined with a glove box (20) is provided. The airtight box (30) for measurement includes a hollow housing (31), and a sample stage (34) having a sample loading portion. The sample stage (34) is transported by a transport stage (35) installed in the housing (31). The housing (31) is provided with a measurement window (40) for measuring a sample loaded on the sample stage (34) from the outside by a measurement apparatus (10).
Claims15
An airtight apparatus comprising:
- an airtight box for measurement for placing therein a sample to be measured by a measurement apparatus installed outside;
- and
- a glove box connected to the airtight box for measurement,
- wherein the glove box includes an opening portion,
- wherein the airtight box for measurement comprises:
- a housing that is hollow therein and has an opening in a side end surface and a connecting unit for causing the opening to communicate with the opening portion of the glove box;
- a sample stage including a sample loading portion;
- a measurement window that is provided in the housing to measure a sample loaded on the sample stage from the outside by the measurement apparatus;
- and
- a transport stage that is installed in the housing and transports the sample stage,
- wherein the transport stage is configured to extend a transport track of the sample stage up to the inside of the glove box communicating with the inside of the housing.
A measurement apparatus for measuring a sample loaded on a sample stage provided in an airtight apparatus through a measurement window,
- wherein the airtight apparatus includes an airtight box for measurement for placing therein the sample to be measured by the measurement apparatus installed outside and a glove box connected to the airtight box for measurement;
- wherein the glove box includes an opening portion,
- wherein the airtight box for measurement comprises:
- a housing that is hollow therein and has an opening in a side end surface and a connecting unit for causing the opening to communicate with the opening portion of the glove box;
- the sample stage including a sample loading portion;
- and
- the measurement window that is provided in the housing to measure the sample loaded on the sample stage from the outside by the measurement apparatus;
- and
- wherein an opening/closing door is provided, a measurement position is set inside the opening/closing door, and the opening/closing door includes a cutout through which a part of the housing is inserted to arrange the measurement window at a position corresponding to the measurement position.
Dependencies are inferred from the claim text.