Method for improving an EBSD/TKD map
AssigneeBruker Nano, Inc.
InventorsDaniel Radu Goran, Thomas Schwager
Life of this patent
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Abstract
A method for improving the quality/integrity of an EBSD/TKD map, wherein each data point is assigned to a corresponding grid point of a sample grid and represents crystal information based on a Kikuchi pattern detected for the grid point; comprising determining a defective data point of the EBSD/TKD map and a plurality of non-defective neighboring data points, comparing the position of Kikuchi bands of a Kikuchi pattern detected for a grid point corresponding to the defective data point with the positions of bands in at least one simulated Kikuchi pattern corresponding to crystal information of the neighboring data points and assigning the defective data point the crystal information of one of the plurality of neighboring data point based on the comparison.
Claims14
A method for improving an EBSD/TKD map comprising a plurality of data points, each data point being assigned to a corresponding grid point of a sample grid and representing crystal information based on a Kikuchi pattern detected for the grid point, the method comprising:
- determining a defective data point of the EBSD/TKD map and a plurality of non-defective neighboring data points of the defective data point;
- comparing Kikuchi bands of a Kikuchi pattern detected for a grid point corresponding to the defective data point with at least one simulated Kikuchi pattern corresponding to crystal information of the plurality of non-defective neighboring data points;
- and
- assigning crystal information of one of the plurality of non-defective neighboring data points to the defective data point based on the comparing.
A method for determining a sample structure, the method comprising:
- obtaining an EBSD/TKD map with a plurality of data points, each data point being assigned crystal information for a corresponding point of a sample grid;
- determining a defective data point of the EBSD/TKD map and a plurality of non-defective neighboring data points of the defective data point;
- comparing Kikuchi bands of a Kikuchi pattern detected for a grid point corresponding to the defective data point with at least one simulated Kikuchi pattern corresponding to crystal information of the plurality of non-defective neighboring data points;
- and
- assigning crystal information of one of the plurality of non-defective neighboring data points to the defective data point based on the comparing.
Dependencies are inferred from the claim text.