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AssigneesDenso Corporation, Nagano Keiki Co., Ltd.
InventorsHiroshi Kodama, Naoki Yoshida, Kaori Miyashita, Eiji Takeda, Nobuaki Yamada, Yoshihiro Tomomatsu, Yasushi Yanagisawa, Yusuke Midorikawa, Shirou Kamanaru, Kenichi Yokoyama, Inao Toyoda, Hisayuki Takeuchi, Naohisa Niimi, Masao Takahashi, Yasutake Ura, Kouji Asano, Yukihiro Kamada
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A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.
A pressure sensor that detects a pressure of a pressure medium, comprising:
Dependencies are inferred from the claim text.