Valve for controlling a flow of a fluid

A valve for controlling a flow of a fluid, the valve comprising:

• a sealing plate comprising a plurality of ports for passage of the fluid through the sealing plate in a direction substantially perpendicular to a plane of the sealing plate;
• and a plurality of valve members, each valve member of the plurality of valve members comprising at least one anchor portion arranged in a fixed relationship with the sealing plate and a closure portion contiguous with the at least one anchor portion and in a movable relationship with the sealing plate under a differential pressure of the fluid across the valve, the closure portion movable away from the sealing plate under a first differential pressure direction to open at least one port of the plurality of ports and toward the sealing plate under a second and opposite differential pressure direction to close said at least one port of the plurality of ports, wherein the at least one anchor portion of the plurality of valve members partitions the closure portions from each other to define a plurality of valve cells, each valve cell of the plurality of valve cells comprising one of the valve members and at least one associated port;
• wherein an anchor portion of at least one of the valve members comprises an anchor portion of an adjacent one of the valve members;
• wherein each of the plurality of valve cells has a length of less than 1000 pm, the closure portion is movable away from the sealing plate under the first differential pressure by a distance of less than 100 pm, and the material of the one of the valve members has a Young's Modulus less than 50 GPa, a thickness less than 50 um, and a density less than 3000 kg/m3 such that the plurality of valve members are structurally configured to operate at a frequency of at least 20 kHz.