In situ polymerization of para-xylene for production of parylene F-like coating

A method for depositing coating onto a substrate, comprising:

• providing a monomer for creation of a protective coating on a substrate, wherein the monomer comprises one of:
• 1,4-Bis(1-methoxyethyl)benzene;
• 1,4-bis(a-methoxyethyl) benzene;
• 2,5--dimethoxyethylbenzene;
• 1,4-Bis(1-mthoxypropyl)benzene;
• 1,4-Bis(1-methoxy--2—methylpropyl)benzene;
• 1,4-Bis(1-methoxybutyl)benzene;
• 1-(1-methoxyethyl)-4-(1-methoxybutyl)benzene;
• 1-(1-methoxymethyl);
• 4-(1-methoxy-2-methylpropyl)benzene;
• 1-(1-methoxyethyl)-4-(1-methoxy-2-methylpropyl)benzene;
• 1-(1-methoxymethyl)-4-(1-methoxy-1-phenylmethyl)benzene;
• 1-(1-methoxyethyl)-4-(1-methoxy-1-phenylmethyl)benzene;
• 1-(1-methoxy-2-methylpropyl)-4-(1-methoxy-1-phenylmethyl)benzene;
• 1-(1-methoxymethyl)-4-(1-methoxy-1-tolylmethyl)benzene or 1,4-Bis(1-methoxy-1-phenylmethyl)benzene;
• energizing the monomer with a plasma generation system;
• and
• polymerizing the energized monomer onto the substrate in a plasma-enhanced chemical vapor deposition (PECVD) chamber to form a coating, wherein the monomer is energized before entering the PECVD chamber, and
• wherein the monomer polymerizes by step-growth polymerization.