Multifunction magnetic and piezoresistive MEMS pressure sensor
AssigneeApple Inc.
InventorsMajid Khan, Roberto M. Ribeiro, Savas Gider
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Abstract
Aspects of the subject disclosure include a pressure-sensing device consisting of a housing including a membrane and one or more piezoresistive elements disposed on the membrane to sense a displacement due to a deflection of the membrane. A first set of electrodes is disposed over the membrane, and a second set of electrodes is disposed on a permeable port of the device at a distance from the membrane. The first and second sets of electrodes form an electrostatic actuator to exert a repulsive force onto the membrane to reduce the deflection of the membrane.
Claims19
A pressure-sensing device, the device comprising:
- a housing including a membrane;
- one or more piezoresistive elements disposed on the membrane and configured to sense a displacement due to a deflection of the membrane;
- a first set of electrodes disposed over the membrane;
- and
- a second set of electrodes disposed on a permeable port of the device at a distance from the membrane,
- wherein the first set of electrodes and the second set of electrodes form an electrostatic actuator configured to exert a repulsive force onto the membrane to reduce the deflection of the membrane.
An apparatus comprising:
- a membrane including one or more piezoresistive elements configured to sense a displacement due to a deflection of the membrane;
- and
- a first set of electrodes disposed over the membrane and a second set of electrodes disposed on a permeable port at a distance from the membrane to exert a repulsive force onto the membrane to reduce the deflection.
A communication device comprising:
- a pressure sensor component enclosed in a housing and including:
- a membrane;
- a permeable port at a distance from the membrane;
- one or more piezoresistive elements disposed on the membrane and configured to sense a displacement due to a deflection of the membrane;
- a first set of electrodes disposed over the membrane;
- and
- a second set of electrodes disposed on the permeable port.
Dependencies are inferred from the claim text.