US 11,936,985 B2Granted

Appearance inspection device and defect inspection method

AssigneeOMRON Corporation

InventorsShingo Hayashi, Daisuke Konishi

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Abstract

Provided is a technique capable of more accurately determining a solder protruding defect in an appearance inspection device that acquires an image of an inspection region of an inspection target and measures a height of a predetermined place in the inspection region with a height measurement device. The appearance inspection device includes: an imaging unit (3); a height measurement unit (20); a moving mechanism (5) that moves the imaging unit (3) and the height measurement unit (20). When a restricted region (M) in the inspection target is irradiated with the measurement light emitted from the height measurement unit (20), the determination unit restricts defect determination based on the information on the height of the predetermined place measured by the height measurement unit (20).

Claims11

Dependent claims

An appearance inspection device comprising:

an imaging unit configured to capture an image of an inspection region on an inspection target;
a height measurement unit configured to emit measurement light and receive reflected light of the measurement light to measure a height of a predetermined place in the inspection target;
a moving mechanism configured to relatively move the imaging unit, the height measurement unit, and the inspection target to change the inspection region captured by the imaging unit and the predetermined place where the height is measured by the height measurement unit;
a determination unit configured to determine whether the inspection target has a defect in the inspection region based on an image of the inspection region captured by the imaging unit and information on the height of the predetermined place measured by the height measurement unit;
and
a restriction unit configured to cause the determination unit to restrict determination of whether there is the defect based on the information on the height of the predetermined place measured by the height measurement unit when a predetermined restricted region in the inspection target is irradiated with the measurement light emitted from the height measurement unit.

3 more elements

A defect inspection method using an appearance inspection device comprising:

an imaging unit configured to capture an image of an inspection region on an inspection target;
a height measurement unit configured to emit measurement light and receive reflected light of the measurement light to measure a height of a predetermined place in the inspection target;
and
a moving mechanism configured to relatively move the imaging unit, the height measurement unit, and the inspection target to change the inspection region captured by the imaging unit and the predetermined place where the height is measured by the height measurement unit, the method comprising:
determining whether the inspection target has a defect in the inspection region based on an image of the inspection region captured by the imaging unit and information on the height of the predetermined place measured by the height measurement unit;
and
restricting determination of whether there is the defect based on the information on the height of the predetermined place measured by the height measurement unit when a predetermined restricted region in the inspection target is irradiated with the measurement light.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/765,396Filed 10 Mar 2020
Priority: JP 2019-19244323 Oct 2019
Published: US 2022/0360720 A110 Nov 2022
Granted: 19 Mar 2024
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

H04N 23/695
Control of cameras or camera modules: control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects
G01B 11/0608
For measuring thickness ; e.g. of sheet material: height gauges
G01B 11/24
Measuring arrangements characterised by the use of optical techniques: for measuring contours or curvatures
G01N 21/956
Characterised by the material or shape of the object to be examined: inspecting patterns on the surface of objects