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US 11,935,769 B2Granted
Interlock apparatus for chemical supply system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFang-Pin Chiang, Tsung-Lin Tsai, Chaoyen Huang, Yi Chuan Chen
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Abstract
The present disclosure provides a chemical supply system, including a chamber, a tubing extending into the chamber, an interlock apparatus, including a fixture for fastening the tubing, and means for determining whether the tubing is fastened by the fixture.
Claims20
A method for chemical container exchange, comprising:
- detaching a tubing from a first chemical container in a chamber;
- coupling the tubing to an interlock apparatus;
- positioning a next chemical container different from the first chemical container in the chamber, wherein the next chemical container contains chemical;
- obtaining a status of the interlock apparatus, comprising
- obtaining a first signal when the interlock apparatus is under a first status;
- and
- obtaining a second signal when the interlock is under a second status;
- transmitting a supply instruction to a controller;
- and
- supplying chemical from the next chemical container when the first signal is received.
7 more elements
A method for chemical container exchange, comprising:
- detaching a tubing from a first chemical container in a chamber;
- coupling the tubing to an interlock apparatus;
- placing a next chemical container different from the first chemical container in the chamber;
- obtaining a first signal when the interlock apparatus is under a first status;
- obtaining a second signal when the interlock is under a second status;
- transmitting a supply instruction to a controller;
- and
- supplying chemical from the next chemical container when the first signal is received.
5 more elements
A method for chemical container exchange, comprising:
- transmitting a first signal to a controller when an interlock apparatus is under a first status that a tubing is not coupled to the interlock apparatus in a chamber;
- detaching the tubing from a first chemical container and coupling the tubing to the interlock apparatus;
- replacing the first chemical container with a second chemical container;
- and
- transmitting a second signal to the controller when the interlock apparatus is under a second status that the tubing is coupled to the interlock apparatus.
2 more elements
Dependencies are inferred from the claim text.