Imprinting method using a solvent to remove a mold and the related imprinting system
AssigneeEver Radiant Incorporation
InventorSung-Wen Tsai
Life of this patent
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Abstract
The present invention provides an imprinting method, which includes the steps of: adding a soluble material to a master mold; solidifying the soluble material to form a soluble mold having a mold pattern; adhering a taking device to the soluble mold to separate the soluble mold from the master mold; placing the soluble mold on a polymer layer of a workpiece for imprint; applying a high temperature and a pressure to the soluble mold to allow the polymer layer having an imprint pattern corresponding to the mold pattern and being solidified, and to remove the taking device from the soluble mold; and providing a solvent to dissolve the soluble mold to obtain an imprint workpiece having the imprint pattern.
Claims10
An imprinting method, comprising:
- adding a soluble material to a master mold;
- solidifying the soluble material to form a soluble mold having a mold pattern;
- adhering a taking device to the soluble mold to separate the soluble mold from the master mold;
- placing the soluble mold onto a polymer layer of a workpiece for imprint;
- applying a temperature and a pressure to the soluble mold to allow the polymer layer having an imprint pattern corresponding to the mold pattern and being solidified, and to remove the taking device from the soluble mold, wherein the temperature is from 50° C. to 160° C.;
- and
- providing a solvent to dissolve the soluble mold to obtain an imprint workpiece having the imprint pattern.
An imprinting method, comprising:
- adding a soluble material to a master mold;
- solidifying the soluble material to form a soluble mold having a mold pattern;
- adhering a taking device to the soluble mold to separate the soluble mold from the master mold;
- placing the soluble mold on a polymer layer of a workpiece for imprint;
- applying a first temperature and a pressure to the soluble mold to allow the polymer layer having an imprint pattern corresponding to the mold pattern and to remove the taking device from the soluble mold;
- applying a second temperature to the soluble mold, the second temperature being higher than the first temperature, to allow the polymer layer being solidified;
- and
- providing a solvent to dissolve the soluble mold to obtain an imprint workpiece having the imprint pattern.
Dependencies are inferred from the claim text.