Cross-beam axial accelerometer

An accelerometer comprising:

• a frame portion defining an aperture;
• and
• a central portion suspended in the aperture;
• wherein the central portion is suspended by:
• a connecting portion disposed on an upper surface and a lower surface of the central portion and connecting the frame portion and the central portion, wherein the connecting portion consists of:
• a single first elastic beam extending only in an X-axis direction from the upper surface of the central portion and connected to the frame portion at first and second edges;
• and
• a single second elastic beam extending only in a Y-axis direction from the lower surface of the central portion and connected to the frame portion at third and fourth edges;
• wherein the first elastic beam and the second elastic beam have mutually transverse orientations, such that the single first elastic beam and the single second elastic beam overlap only at the central portion;
• and
• a sensing portion that converts a sensed acceleration into an electrical signal,
• wherein the accelerometer is configured to sense an acceleration in a Z-axis direction penetrating the upper surface and the lower surface of the central portion and to reduce a sensing of an acceleration in the X-axis direction and the Y-axis direction crossing the Z-axis direction,
• wherein the first elastic beam has a same width as a width of the central portion in the Y-axis direction, and
• wherein the second elastic beam has a same width as a width of the central portion in the X-axis direction.