Micromachined thermal time-of-flight fluidic concentration metering device

A fluidic concentration metering device utilizing a micro-fabricated sensor based on thermal time-of-flight sensing principle with a capability to metering a full dynamic concentration range comprising:

• A fluidic concentration measurement chamber having a fluidic channel that is in a form of a closed conduit and guiding a fluid to be measured;
• A micro-machined thermal time-of-flight sensing chip that is used to metering thermal diffusivity of the fluid;
• A cavity inside the fluidic concentration measurement chamber, wherein the cavity is connected to the fluidic channel and providing a housing space for the micro-machined thermal time-of-flight sensor chip;
• An additional thermistor integrated on the micro-machined thermal time-of-flight sensing chip for a local fluidic temperature measurement;
• A recess space between the sensor chip surface and a wall of the fluidic channel, which makes the fluid under a thermal diffusivity measurement at a static state;
• A printed circuitry board for the signal conditioning, data processing, and user interface electronics;
• and
• A meter enclosure which is used to housing all components into a complete and stand-alone fluidic concentration metering device, wherein the housing enclosure meets safety requirements for the industrial application domain.