US 11,927,281 B1Granted

Piezoelectrically-actuated microvalve device and method of fabrication

AssigneeCorporation for National Research Initiatives

InventorsMichael A. Huff, Mehmet Ozgur

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Abstract

A three-way (3-way) Micro-Electro-Mechanical Systems (MEMS)-based micro-valve device and method of fabrication for the implementation of a three-way MEMS-based micro-valve that uses a multicity of piezoelectric actuators. The 3-way has a wide range of applications including medical, industrial control, aerospace, automotive, consumer electronics and products, as well as any application(s) requiring the use of three-way micro-valves for the control of fluids. The three-way microvalve device and method of fabrication can be tailored to the requirements of a wide range of applications and fluid types. The microvalve can be used to control fluids at high pressures and provides for low flow resistances when the microvalve is open and has low leakage when closed.

Claims52

Dependent claims

A 3-way microvalve device comprising:

a first, second and a third fluidic ports;
a first piezoelectric actuator;
a second piezoelectric actuator;
a spacer attached to a first movable membrane of a pre-determined thickness positioned over the first fluidic port between the first and second piezoelectric actuators, wherein the movable membrane is in physical contact with sealing rings located around a perimeter of the first fluidic port forming a normally-closed component of the microvalve;
a third piezoelectric actuator attached to a second movable membrane of a pre-determined thickness positioned over the second fluidic port wherein the second movable membrane is not in physical contact with sealing rings located around the perimeter of the second fluidic port forming a normally-open component of the microvalve;
and
a fluid flow channel connecting the third fluidic port, the normally-open and normally-closed components of the microvalve,
wherein the first, second and third piezoelectric actuators are configured to generate applied forces to open and close one or more of the first, second and third fluidic ports to the flow of fluids through the microvalve.

5 more elements

A three-way microvalve device comprising:

a first fluid chamber including a first fluid port;
a second fluid chamber including a second fluid port;
a fluid channel connecting the first and second fluid chambers that includes a third fluid port;
a first fluid sealing surface provided around an opening of the first fluid port protruding from a bottom of a first surface of the first fluid chamber;
a second fluid sealing surface provided around an opening of the second fluid port protruding from a bottom of a second surface of the second fluid chamber;
a first membrane disposed in the first fluid chamber fixed to sidewalls of the first fluid chamber and in physical contact with the first fluid sealing surface;
a second membrane disposed at a top of the second fluid chamber fixed to sidewalls of the second fluid chamber and not in physical contact with the second fluid sealing surface;
a first mechanism comprising a first and a second piezoelectric actuator and a spacer element that are mechanically coupled to the first membrane whereupon the application of an electrically applied signal to the first and second piezoelectric actuators of the normally-closed first component of the microvalve results in a change of state from closed to open to the flow of fluid through the microvalve;
and
a second mechanism composed of a third piezoelectric actuator coupled to the second membrane that upon application of an electrically applied signal to the third piezoelectric actuator of the normally-open first component of the microvalve results in a change state from open to closed to the flow of fluids through the microvalve.

7 more elements

Dependencies are inferred from the claim text.