Microfabrication of omni-view peripheral scanning system
AssigneeBeijing Voyager Technology Co., Ltd.
InventorsYoumin Wang, Yue Lu
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Abstract
Embodiments of the disclosure provide methods for microfabricating an omni-view peripheral scanning system. One exemplary method may include separately fabricating a reflector and a scanning MEMS mirror, and then bonding the microfabricated reflector with the scanning MEMS mirror to form the omni-view peripheral scanning system. The microfabricated reflector may include a cone-shaped bottom portion, and a via hole across the cone-shaped bottom portion. The microfabricated scanning MEMS mirror may include a MEMS actuation platform and a scanning mirror supported by the MEMS actuation platform. The scanning MEMS mirror may face the cone-shaped bottom portion of the reflector when forming the omni-view peripheral scanning system.
Claims20
A method for making an omni-view peripheral scanning system, the method comprising:
- fabricating a reflector using a first micro-fabrication process, wherein the reflector comprises a cone-shaped bottom portion, and a via hole across the cone-shaped bottom portion;
- constructing a scanning micro-electro-mechanical systems (MEMS) mirror, wherein the scanning MEMS mirror comprises a MEMS actuation platform and a scanning mirror supported by the MEMS actuation platform;
- and
- bonding the reflector on top of the scanning MEMS mirror such that the scanning MEMS mirror faces the cone-shaped bottom portion to form the omni-view peripheral scanning system.
A method for making an optical sensing system with an omni-view peripheral scanning system, comprising:
- constructing the omni-view peripheral scanning system comprising a reflector bonded on top of a scanning MEMS mirror, wherein the scanning MEMS mirror comprises a MEMS actuation platform and a scanning mirror supported by the MEMS actuation platform, and wherein the reflector comprises a cone-shaped bottom portion, and a via hole across the cone-shaped bottom portion;
- and
- coupling the MEMS actuation platform to a controller for controlling a voltage differential to be applied to each of a plurality of comb drive actuators in the MEMS actuation platform.
Dependencies are inferred from the claim text.