Bulk acoustic wave resonator on surface acoustic wave device
AssigneeSkyworks Solutions, Inc.
InventorsKeiichi Maki, Hironori Fukuhara, Rei Goto
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Abstract
An acoustic wave filter component can include a surface acoustic wave device including a first piezoelectric layer, an interdigital transducer electrode on the first piezoelectric layer, and an additional layer, such as a temperature compensation layer, over the interdigital transducer electrode. The acoustic wave filter component can also include a bulk acoustic wave resonator supported by the additional layer. The additional layer may be a layer on which a surface acoustic wave of the surface acoustic wave device will propagate. The bulk acoustic wave resonator may include an air cavity, where a shape of the air cavity is defined in part by the additional layer.
Claims20
An acoustic wave filter component comprising:
- a surface acoustic wave device including a first piezoelectric layer, an interdigital transducer electrode on the first piezoelectric layer, and at least a portion of a temperature compensation layer positioned on the interdigital transducer electrode;
- and
- a bulk acoustic wave resonator supported by the temperature compensation layer, the bulk acoustic wave resonator including a second piezoelectric layer and electrodes on opposing sides of the second piezoelectric layer.
An acoustic wave filter component comprising:
- a first piezoelectric layer;
- an interdigital transducer electrode over the first piezoelectric layer;
- a temperature compensation layer over the interdigital transducer electrode;
- and
- a bulk acoustic wave resonator supported by the temperature compensation layer, the bulk acoustic wave resonator including a second piezoelectric layer and electrodes on opposing sides of the second piezoelectric layer.
Dependencies are inferred from the claim text.