Conveyor device and semiconductor production equipment
AssigneeChangxin Memory Technologies, Inc.
InventorXueyu Liang
Life of this patent
Estimating the term…
Abstract
This application provides a conveyor device and semiconductor production equipment, and relates to the technical field of semiconductor production equipment. The conveyor device is installed on a machine platform of semiconductor production equipment, the machine platform is provided with a guide structure, and the guide structure is provided with multiple oil injection ports arranged along an extension direction of the guide structure. The conveyor device includes a conveyor platform and a driving mechanism, where the conveyor platform is slidably installed on the guide structure to carry and convey wafers, the conveyor platform covers at least one of the multiple oil injection ports, and the driving mechanism is connected to the conveyor platform.
Claims15
A conveyor device, installed on a machine platform of semiconductor production equipment, wherein the machine platform is provided with a guide structure, and the guide structure is provided with multiple oil injection ports arranged along an extension direction of the guide structure;
- and the conveyor device comprises:
- a conveyor platform, wherein the conveyor platform is slidably installed on the guide structure to carry and convey wafers, and the conveyor platform covers at least one of the multiple oil injection ports;
- and
- a driving mechanism, wherein the driving mechanism is connected to the conveyor platform, and the driving mechanism is configured to drive the conveyor platform to move up or down relative to the machine platform, to expose the oil injection ports covered by the conveyor platform.
Dependencies are inferred from the claim text.