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US 11,923,185 B2Granted
Method of fabricating a high-pressure laser-sustained-plasma lamp
AssigneeKLA Corporation
InventorsMark S. Wang, Joshua Wittenberg
Life of this patent
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Abstract
A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.
Claims7
A method of forming a high-pressure plasma lamp comprising:
- providing a lamp bulb, the lamp bulb including a top channel and a bottom channel;
- inserting a top electrode element into the top channel of the lamp bulb;
- providing a glass tubular structure attached to a bottom electrode element, wherein the bottom electrode element includes a multi-step thickness profile, wherein an internal structure of the glass tubular structure conforms to a portion of the multi-step thickness profile of the bottom electrode element and wherein the outer surface of the bottom electrode element and the outer surface of the glass tubular structure are coextensive;
- filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb;
- and
- inserting the bottom electrode element and the glass tubular structure into the bottom channel.
3 more elements
Dependencies are inferred from the claim text.