CD73 compounds

A compound of Formula I:

• Or a pharmaceutically acceptable salt thereof, wherein:
• X is C or N,
• Y is CH or N;
• Z is C or N;
• provided that one of X, Y and Z is CH or C, and two of X, Y and Z are N;
• R1 is selected from H and CH2OP(O)(OH)2;
• R2 is a C3-6 cycloalkyl or a 3-8 membered heterocyclyl;
• wherein said cycloalkyl and said heterocyclyl are substituted with one or more R4,
• R3 is H or halo;
• R4 is independently selected from H, halo, C1-4 alkyl, —OR5, C6-10 aryl, or 4-10 membered heteroaryl;
• wherein said C1-4 alkyl, C6-10 aryl, or 4-10 membered heteroaryl is optionally substituted with one or more R6;
• R5 is C1-5 alkyl, C1-5 alkenyl, C1-5 alkynyl, said C1-5 alkyl, C1-5 alkenyl, C1-5 alkynyl, C6-10 aryl, or 4-10 membered heteroaryl and is optionally substituted with one or more R6 and halo;
• R6 is a C1-5 alkyl, C3-6 cycloalkyl, C1-5 alkenyl, C1-5 alkynyl, or 4-10 membered heteroaryl, said C1-5 alkyl, C3-6 cycloalkyl, C1-5 alkenyl, or C1-5 alkynyl is optionally substituted with halo, and said 4-10 membered heteroaryl optionally substituted with C1-4 alkyl, or C1-4 haloalkyl.