Self-sensing and self-actuating valve for modulating process coolant flow

A valve comprising:

• a flow compartment having a first inlet and an outlet that support a default flow rate of a coolant from a return line between a processing chamber and a coolant source, the flow compartment also having a second inlet;
• a plunger having a tip to variably open and close the second inlet to vary a flow rate of the coolant from the default flow rate;
• and
• a shape memory alloy (SMA) spring positioned on the plunger between an inner side of the valve and the tip, the SMA spring attached to the tip to variably withdraw the tip from the second inlet in response to a rise in temperature of the coolant above a threshold temperature value.

A valve comprising:

• a flow compartment attached between a first inline compartment and a second inline compartment and through which a coolant is to return to a coolant source, wherein the flow compartment comprises:
• a first inlet orifice and a second inlet orifice shared with the first inline compartment;
• and
• an outlet orifice shared with the second inline compartment;
• a plunger having a tip to variably open and close the second inlet orifice;
• and
• a shape memory alloy (SMA) spring positioned on the plunger and attached to the tip, the SMA spring to variably increase or decrease a flow rate of the coolant through the second inlet orifice according to a temperature of the coolant.