Back to results
US 11,914,264 B2Granted
Hybrid photonic ring modulators
AssigneeOpenLight Photonics, Inc.
InventorsJohn Parker, Jonathan Edgar Roth, Gregory Alan Fish
Life of this patent
Estimating the term…
Abstract
Photonic ring modulators with high tuning efficiency and small footprint can be formed in a hybrid material platform from a silicon bus waveguide vertically coupled to an optically active compound semiconductor (e.g., III-V) ring resonator. The performance of the modulator, e.g., in terms of the tuning efficiency and the maximum insertion loss, may be optimized by suitable levels of an applied bias voltage and a heater power of a heater optionally included in the ring modulator. The disclosed hybrid photonic ring modulators may be used, e.g., in photonic transceiver circuits with high lane count.
Claims16
A hybrid photonic ring modulator for modulating light at a target operating wavelength, the photonic ring modulator comprising:
- a silicon bus waveguide formed in a silicon device layer of a silicon-on-insulator (SOI) substrate;
- and
- a ring resonator structure formed above the silicon device layer, the ring resonator structure comprising a p-i-n diode structure of compound semiconductor material and associated electrodes, an active region of the p-i-n diode structure forming a ring waveguide laterally overlapping with the silicon bus waveguide, the ring waveguide and the silicon bus waveguide together forming a vertical directional coupler in an overlap region;
- a heater placed above the silicon device layer near the p-i-n diode structure;
- electronic driver circuitry electrically connected to the electrodes to apply a voltage across the p-i-n-diode structure, the voltage including a reverse bias voltage and a radio-frequency (RF) voltage swing;
- and
- memory storing a target value of the reverse bias voltage and a target value of a power of the heater,
- wherein the target value of the reverse bias voltage maximizes a tuning efficiency of shifting, by a change in the applied voltage, a spectral location of a modulator response of the photonic ring modulator, subject to exceeding a specified loss cutoff level for a maximum modulator insertion loss at a resonance wavelength of the modulator response, and
- wherein the target value of the power of the heater optimizes an offset between the resonance wavelength of the modulator response at the target value of the reverse bias voltage and the target operating wavelength to achieve a target insertion loss at the target operating wavelength.
6 more elements
A photonic integrated circuit (PIC) comprising:
- a laser to emit light at an operating wavelength;
- and
- a hybrid photonic ring modulator comprising:
- a silicon bus waveguide vertically coupled to a ring-shaped active region of a p-i-n diode structure formed of compound semiconductor material, an optical input of the silicon bus waveguide coupled to an output of the laser, and an optical output of the silicon bus waveguide coupled to an output port of the PIC;
- a heater placed near the p-i-n diode structure;
- electrodes and associated electronic driver circuitry configured to apply a voltage across the p-i-n-diode structure, the voltage including a reverse bias voltage and a radio-frequency (RF) voltage swing;
- and
- memory storing a target value of the reverse bias voltage and a target value of a power of the heater,
- wherein the target value of the reverse bias voltage maximizes a tuning efficiency of shifting, by a change in the applied voltage, a spectral location of a modulator response of the photonic ring modulator, subject to exceeding a specified loss cutoff level for a maximum modulator insertion loss at a resonance wavelength of the modulator response,
- wherein the target value of the heater power optimizes an offset between the operating wavelength and the resonance wavelength of the modulator response at the target value of the reverse bias voltage to achieve a target insertion loss at the operating wavelength.
7 more elements
A method of modulating light guided in a silicon waveguide, the method comprising:
- vertically coupling the light at an operating wavelength from the silicon waveguide into an optically active ring waveguide of a compound semiconductor p-i-n diode structure formed above the silicon waveguide, the ring waveguide having an associated resonance wavelength;
- applying a voltage across the p-i-n diode structure to thereby modulate a refractive index in the ring waveguide, the voltage including a direct-current (DC) reverse bias voltage and a swing voltage;
- and
- heating the p-i-n diode structure,
- wherein the DC reverse bias voltage is set to a stored value that maximizes a modulator tuning efficiency of shifting, by a change in the applied voltage, the resonance wavelength, subject to exceeding a specified loss cutoff level for a maximum modulator insertion loss associated with the resonance wavelength, and
- wherein a power of the heater is set to a value that optimizes an offset between the operating wavelength and the resonance wavelength at the set value of the DC reverse bias voltage to achieve a target insertion loss at the operating wavelength.
3 more elements
Dependencies are inferred from the claim text.