Method of forming an elongate electrical connection feature traversing a microscopic step

A method of forming an elongate electrical connection feature traversing at least one microscopic step on or in a substrate, comprising the steps of:

• (A) continuously extruding a metallic nanoparticle composition from a capillary tube while displacing the capillary tube relative to the substrate from a first position to a second position, the first position and the second position being at a step bottom portion, the displacing being predominantly lateral, the extruded metallic nanoparticle composition overlying and contacting the step bottom portion;
• (B) extruding the metallic nanoparticle composition from the capillary tube while displacing the capillary tube relative to the substrate from the second position to a third position, the third position being at a height not lower than a step top portion, the extruded metallic nanoparticle composition extending between the step bottom portion and the step top portion and contacting a sidewall of the at least one microscopic step;
• and
• (C) continuously extruding the metallic nanoparticle composition from the capillary tube while displacing the capillary tube relative to the substrate from the third position to a fourth position, the fourth position being at a step top portion, the displacing being predominantly lateral, the extruded metallic nanoparticle composition overlying and contacting the step top portion;
• wherein the step (B) of extruding the metallic nanoparticle composition comprises the sub-steps of:
• (BI) continuously extruding the metallic nanoparticle composition from the capillary tube while raising the capillary tube by a height increment during a displacement period;
• (B2) continuously extruding the metallic nanoparticle composition from the capillary tube while the capillary tube is stationary during a stationary period;
• and
• (B3) repeatedly executing sub-steps (B1) and (B2) until the capillary tube reaches the third position.