# US 11,910,695 B2 · Mask plate, display panel and display device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,910,695 B2 - Document ID: US11910695B2 - Status: Granted - Kind: B2 - Application number: 17/406,712 - Filed: 2021-08-19 - Published: 2022-04-28 - Granted: 2024-02-20 - Earliest claimed: 2020-10-28 - Assignees: Chengdu Boe Optoelectronics Technology Co., Ltd.; Boe Technology Group Co., Ltd. - Applicants: Chengdu BOE Optoelectronics Technology Co., Ltd.; Boe Technology Group Co., Ltd. - Inventors: Wenhui Gao; Kai Zhang; Erlong Song; Lingran Wang; Jianjie Liu - Web page: https://patentgrep.com/patent/US11910695B2 ## CPC - G03F 1/32: Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion,; Preparation thereof - H10K 59/1201: {Manufacture or treatment} - H10K 59/123: Connection of the pixel electrodes to the thin film transistors [TFT] - H10K 59/124: Insulating layers formed between TFT elements and OLED elements - H10K 71/233: {by photolithographic etching} - H10K 71/166: {using selective deposition, e.g. using a mask} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract The present disclosure provides a mask plate, a display panel and a display device. The mask plate comprises: a transparent substrate; an opaque film layer, the opaque film layer being disposed on the transparent substrate. The opaque film layer includes a plurality of first regions and a plurality of second regions, a first sub-region in the first region and the second region are transmissive, and the remaining portion in the first region is semi-transmissive. The mask plate is used to form via holes in the planarization layer of the display panel by exposure, so that the angles between the metal electrode layers disposed in the via holes and the source/drain layers of the display panel are small and diversified, decreasing the visibility of the metal electrode layers. ## Claims ### Claim 1 A mask plate, comprising: a transparent substrate; and an opaque film layer, the opaque film layer being disposed on the transparent substrate, wherein the opaque film layer comprises a plurality of first regions and a plurality of second regions, wherein a first sub-region in a first region of the plurality of first regions and a second region of the plurality of second regions are transmissive, and wherein a remaining portion in the first region is semi-transmissive, the remaining portion in the first region comprises an annular third sub-region surrounding the first sub-region from four sides and an annular fourth sub-region surrounding the third sub-region from four sides, the third sub-region is opaque, and the fourth sub-region is transmissive. ### Claim 2 (depends on 1) The mask plate according to claim 1, wherein a distance between a third edge line and a fourth edge line in the first region is 0.5 μm-2 μm, the third edge line is a boundary line between the third sub-region and the first sub-region, and wherein the fourth edge line is a boundary line between the third sub-region and the fourth sub-region. ### Claim 3 (depends on 1) The mask plate according to claim 1, wherein a distance between a fourth edge line and a fifth edge line in the first region is 0.5 μm-2.5 μm, wherein the fourth edge line is a boundary line between the third sub-region and the fourth sub-region, and wherein the fifth edge line is a boundary line between the opaque film layer and the fourth sub-region. ### Claim 4 (depends on 1) The mask plate according to claim 1, wherein the first regions and the second regions are arranged at intervals. ### Claim 5 A display panel, comprising: a substrate; a driving function film layer, the driving function film layer being disposed on the substrate; a planarization layer, the planarization layer being disposed on a side of the driving function film layer away from the substrate, the planarization layer being provided with a plurality of via holes, the plurality of via holes exposing a plurality of source/drain layers arranged at intervals in the driving function film layer, the plurality of via holes being formed by etching, and sidewalls of at least some of the plurality of via holes being sloped with respect to the plurality of source/drain layers; and a display function film layer, the display function film layer being disposed on a side of the planarization layer away from the substrate, a partial region of a first metal electrode layer of each sub-pixel in the display function film layer being disposed in a corresponding via hole to connect the first metal electrode layer to a respective source/drain layer of the plurality of source/drain layers that is exposed by the corresponding via hole, wherein the plurality of via holes comprises a first via hole and a second via hole, and wherein an angle between an edge of the planarization layer that forms the first via hole and the source/drain layer that is exposed by the first via hole is smaller than an angle between an edge of the planarization layer that forms the second via hole and the source/drain layer that is exposed by the second via hole. ### Claim 6 (depends on 5) The display panel according to claim 5, wherein the first via hole and the second via hole are adjacent to each other. ### Claim 7 (depends on 5) A display device comprising the display panel according to claim 5. ### Claim 8 (depends on 7) The display device according to claim 7, wherein the first via hole and the second via hole are adjacent to each other.