# US 11,910,534 B2 · Mounting apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,910,534 B2 - Document ID: US11910534B2 - Status: Granted - Kind: B2 - Application number: 17/312,388 - Filed: 2019-12-09 - Published: 2022-02-10 - Granted: 2024-02-20 - Earliest claimed: 2018-12-10 - Assignees: Kabushiki Kaisha Shinkawa - Applicants: Shinkawa Ltd. - Inventors: Tomonori Nakamura; Koji Matsushita; Hiroshi Omata; Masahito Tsuji; Keiichi Hiruma; Mitsuteru Sakamoto; Ryo Urahashi; Takaya Kinjo; Shota Nakano; Akira Sekikawa - Web page: https://patentgrep.com/patent/US11910534B2 ## CPC - H05K 13/0465: {by soldering (H05K13/0469 takes precedence)} - H05K 13/083: {Quality monitoring using results from monitoring devices, e.g. feedback loops (H05K13/084 takes precedence)} - G01B 11/24: for measuring contours or curvatures - H05K 13/081: {Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines} - H05K 13/0817: {Monitoring of soldering processes (inspection of solder joints or of printed solder paste G01N21/95684)} - H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ## Abstract A mounting device includes: an application part applying paste on a substrate to form an application body; a bonding part forming a mounted body by mounting a chip component on the substrate via the application body; a first imaging part imaging the application body after application processing and before mounting processing to acquire first image information; a second imaging part imaging the mounted body after the mounting processing to acquire second image information; and a control part controlling the application part, the bonding part, and the first and second imaging parts, and obtains a 3D application body shape (first shape) from the first image information as a first shape and calculates a 3D mounted body shape (second shape) from the second image information. The control part evaluates the application processing or the mounting processing based on the first and the second shapes. ## Claims ### Claim 1 A mounting apparatus, for mounting a chip component on a substrate via a paste, comprising: a paste application part that applies the paste on the substrate under predetermined application conditions to form an application body; a bonding part that forms a mounted body obtained by mounting the chip component on the substrate under predetermined mounting conditions via the application body; a first imaging part that images the application body after application processing of the paste and before mounting processing of the chip component to acquire first image information; a second imaging part that images the mounted body after the mounting processing to acquire second image information; and a control part that controls the paste application part, the bonding part, and the first and second imaging part, and obtains a three-dimensional shape of the application body from the first image information as a first shape and calculates a three-dimensional shape of the mounted body from the second image information as a second shape, wherein the control part obtains a paste error which is a result of comparison between the first shape and a first target shape that is a target shape of the application body and a final error which is a result of comparison between the second shape and a second target shape that is a target shape of the mounted body, and evaluates the mounting processing by a mounting error that is obtained by modifying the final error based on the paste error. ### Claim 2 (depends on 1) The mounting apparatus according to claim 1, wherein the control part evaluates the application processing based on at least the first shape, and evaluates the mounting processing based on at least an evaluation result of the application processing and the second shape. ### Claim 3 (depends on 1) The mounting apparatus according to claim 1, wherein the control part estimates the three-dimensional shape of the mounted body as an estimation shape based on at least the first shape and the mounting conditions, evaluates the application processing based on at least the first shape, and evaluates the mounting processing based on at least the estimation shape and the second shape. ### Claim 4 (depends on 3) The mounting apparatus according to claim 3, wherein the control part acquires physical property information of the paste based on a size of the application body, or a fluctuation amount caused by changes in sizes over time between a plurality of application bodies when applying the plurality of application bodies. ### Claim 5 (depends on 4) The mounting apparatus according to claim 4, wherein the control part estimates the estimation shape based on at least the first shape, the mounting conditions, and the physical property information. ### Claim 6 (depends on 4) The mounting apparatus according to claim 4, wherein the control part evaluates the application processing based on the result of comparison between the first target shape which is the target shape of the application body and the first shape, and modifies the first target shape based on the physical property information. ### Claim 7 (depends on 1) The mounting apparatus according to claim 1, wherein the control part changes the application conditions based on the evaluation result of the application processing, and changes the application conditions or the mounting conditions based on the evaluation result of the mounting processing. ### Claim 8 (depends on 1) The mounting apparatus according to claim 1, wherein the control part changes the mounting conditions based on the evaluation result of the application processing. ### Claim 9 (depends on 1) The mounting apparatus according to claim 1, further comprising: a first plane imaging part that images the application body from a vertical direction after the application processing and before the mounting processing to acquire a first plan-view image of the application body; and a second plane imaging part that images the mounted body from a vertical direction after the mounting processing to acquire a second plan-view image of the mounted body; wherein the first imaging part images the application body from an oblique direction to acquire a first oblique-view image of the application body, the second imaging part images the mounted body from an oblique direction to acquire a second oblique-view image of the mounted body, and the control part estimates a shadow shape of the first oblique-view image from the first plane image, and estimates a shadow shape of the second oblique-view image from the second plane image. ### Claim 10 (depends on 1) The mounting apparatus according to claim 1, further comprising: a first plane imaging part that images the application body from a vertical direction after the application processing and before the mounting processing to acquire a first plan-view image of the application body; and a second plane imaging part that images the mounted body from a vertical direction after the mounting processing to acquire a second plan-view image of the mounted body; wherein the first imaging part images the application body from an oblique direction to acquire a first oblique-view image of the application body, the second imaging part images the mounted body from an oblique direction to acquire a second oblique-view image of the mounted body, and the control part calculates a first correlation between the first plan-view image and the first oblique-view image and estimates the three-dimensional shape of the application body based on the first correlation, and calculates a second correlation between the second plan-view image and the second oblique-view image and estimates the three-dimensional shape of the mounted body based on the second correlation. ### Claim 11 (depends on 1) The mounting apparatus according to claim 1, wherein the control part acquires physical property information of the paste based on a size of the application body, or a fluctuation amount caused by changes in sizes over time between a plurality of application bodies when applying the plurality of application bodies. ### Claim 12 (depends on 2) The mounting apparatus according to claim 2, wherein the control part acquires physical property information of the paste based on a size of the application body, or a fluctuation amount caused by changes in sizes over time between a plurality of application bodies when applying the plurality of application bodies. ### Claim 13 (depends on 5) The mounting apparatus according to claim 5, wherein the control part evaluates the application processing based on the result of comparison between the first target shape which is the target shape of the application body and the first shape, and modifies the first target shape based on the physical property information. ### Claim 14 (depends on 2) The mounting apparatus according to claim 2, wherein the control part changes the application conditions based on the evaluation result of the application processing, and changes the application conditions or the mounting conditions based on the evaluation result of the mounting processing. ### Claim 15 (depends on 2) The mounting apparatus according to claim 2, wherein the control part changes the mounting conditions based on the evaluation result of the application processing. ### Claim 16 (depends on 2) The mounting apparatus according to claim 2, further comprising: a first plane imaging part that images the application body from a vertical direction after the application processing and before the mounting processing to acquire a first plan-view image of the application body; and a second plane imaging part that images the mounted body from a vertical direction after the mounting processing to acquire a second plan-view image of the mounted body; wherein the first imaging part images the application body from an oblique direction to acquire a first oblique-view image of the application body, the second imaging part images the mounted body from an oblique direction to acquire a second oblique-view image of the mounted body, and the control part estimates a shadow shape of the first oblique-view image from the first plane image, and estimates a shadow shape of the second oblique-view image from the second plane image. ### Claim 17 (depends on 2) The mounting apparatus according to claim 2, further comprising: a first plane imaging part that images the application body from a vertical direction after the application processing and before the mounting processing to acquire a first plan-view image of the application body; and a second plane imaging part that images the mounted body from a vertical direction after the mounting processing to acquire a second plan-view image of the mounted body; wherein the first imaging part images the application body from an oblique direction to acquire a first oblique-view image of the application body, the second imaging part images the mounted body from an oblique direction to acquire a second oblique-view image of the mounted body, and the control part calculates a first correlation between the first plan-view image and the first oblique-view image and estimates the three-dimensional shape of the application body based on the first correlation, and calculates a second correlation between the second plan-view image and the second oblique-view image and estimates the three-dimensional shape of the mounted body based on the second correlation.