# US 11,910,118 B2 · Backside illumination image sensor, manufacturing method thereof and image-capturing device

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- Number: US 11,910,118 B2
- Document ID: US11910118B2
- Status: Granted
- Kind: B2
- Application number: 18/121,692
- Filed: 2023-03-15
- Published: 2023-07-13
- Granted: 2024-02-20
- Earliest claimed: 2009-02-17
- Assignees: Nikon Corporation
- Applicants: Nikon Corporation
- Inventors: Hironobu Murata
- Web page: https://patentgrep.com/patent/US11910118B2

## CPC

- H04N 25/77: Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
- G02B 3/0056: {arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses (G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085)}
- G02B 5/201: {in the form of arrays}
- H04N 23/67: Focus control based on electronic image sensor signals
- H04N 25/134: {based on three different wavelength filter elements}
- H04N 25/702: SSIS architectures characterised by non-identical, non-equidistant or non-planar pixel layout
- H04N 25/703: SSIS architectures incorporating pixels for producing signals other than image signals
- H04N 25/766: comprising control or output lines used for a plurality of functions, e.g. for pixel output, driving, reset or power
- H10F 39/199: {Back-illuminated image sensors}
- H10F 39/8053: {Colour filters}
- H10F 39/8057: {Optical shielding}
- H10F 39/8063: {Microlenses}
- H10F 39/811: {Interconnections}
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

An image sensor includes a first photoelectric conversion unit that converts light incident through a first opening to an electric charge, a second photoelectric conversion unit that converts light incident through a second opening which is smaller than the first opening to an electric charge, and a signal output wiring that outputs a first signal generated by the electric charge converted by the first photoelectric conversion unit and a second signal generated by the electric charge converted by the second photoelectric conversion unit. The second photoelectric conversion unit is disposed between the second opening and the signal output wiring.

## Claims

### Claim 1

An image sensor comprising:
a first microlens upon which light is incident;
a second microlens upon which light is incident;
a first member having a first opening through which light is transmitted from the first microlens;
a second member having a second opening through which light is transmitted from the second microlens, an opening area of the second opening being smaller than an opening area of the first opening;
a first photoelectric converter that converts light from the first opening to an electric charge;
a second photoelectric converter that converts light from the second opening to an electric charge;
a first charge/voltage converter to which the electric charge from the first photoelectric converter is transferred;
a second charge/voltage converter to which the electric charge from the second photoelectric converter is transferred;
a first source follower transistor that is connected to the first charge/voltage converter and outputs a first signal that is based on a potential of the first charge/voltage converter;
a second source follower transistor that is connected to the second charge/voltage converter and that outputs a second signal that is based on a potential of the second charge/voltage converter;
a first select portion that outputs the first signal to a first signal line;
a second select portion that outputs the second signal to a second signal line;
a first select control line that is connected to the first select portion and to which is output a control signal for controlling the first select portion; and
a second select control line that is connected to the second select portion and to which is output a control signal for controlling the second select portion, wherein:
the first photoelectric converter is disposed between the first microlens and the second select control line in an optical axis direction of the first microlens; and
the second photoelectric converter is disposed between the second microlens and the first select control line in an optical axis direction of the second microlens.

### Claim 2 (depends on 1)

The image sensor according to claim 1, wherein
the second photoelectric converter is disposed at a position on a row direction side from the first photoelectric converter.

### Claim 3 (depends on 2)

The image sensor according to claim 2, wherein:
the first photoelectric converter is disposed between the first microlens and the first select control line in the optical axis direction of the first microlens; and
the second photoelectric converter is disposed between the second microlens and the second select control line in the optical axis direction of the second microlens.

### Claim 4 (depends on 3)

The image sensor according to claim 3, wherein:
the first photoelectric converter is disposed between the first microlens and the first signal line in the optical axis direction of the first microlens; and
the second photoelectric converter is disposed between the second microlens and the second signal line in the optical axis direction of the second microlens.

### Claim 5 (depends on 4)

The image sensor according to claim 4, wherein:
the first signal line is disposed between the first photoelectric converter and the second select control line in the optical axis direction of the first microlens; and
the second signal line is disposed between the second photoelectric converter and the first select control line in the optical axis direction of the second microlens.

### Claim 6 (depends on 5)

The image sensor according to claim 5, wherein:
the first signal line is disposed between the first photoelectric converter and the first select control line in the optical axis direction of the first microlens; and
the second signal line is disposed between the second photoelectric converter and the second select control line in the optical axis direction of the second microlens.

### Claim 7 (depends on 4)

The image sensor according to claim 4, wherein:
the first signal line is disposed between the first photoelectric converter and the first select control line in the optical axis direction of the first microlens; and
the second signal line is disposed between the second photoelectric converter and the second select control line in the optical axis direction of the second microlens.

### Claim 8 (depends on 3)

An image capturing device comprising the image sensor according to claim 3.

### Claim 9 (depends on 8)

The image capturing device according to claim 8, further comprising:
a control unit that is connected to the image sensor, wherein
the control unit uses the second signal from the image sensor to perform focus adjustment of an optical system that causes light to enter the image sensor.

### Claim 10 (depends on 2)

The image sensor according to claim 2, wherein:
the first photoelectric converter is disposed between the first microlens and the first signal line in the optical axis direction of the first microlens; and
the second photoelectric converter is disposed between the second microlens and the second signal line in the optical axis direction of the second microlens.

### Claim 11 (depends on 10)

The image sensor according to claim 10, wherein:
the first signal line is disposed between the first photoelectric converter and the second select control line in the optical axis direction of the first microlens; and
the second signal line is disposed between the second photoelectric converter and the first select control line in the optical axis direction of the second microlens.

### Claim 12 (depends on 11)

The image sensor according to claim 11, wherein:
the first signal line is disposed between the first photoelectric converter and the first select control line in the optical axis direction of the first microlens; and
the second signal line is disposed between the second photoelectric converter and the second select control line in the optical axis direction of the second microlens.

### Claim 13 (depends on 10)

The image sensor according to claim 10, wherein:
the first signal line is disposed between the first photoelectric converter and the first select control line in the optical axis direction of the first microlens; and
the second signal line is disposed between the second photoelectric converter and the second select control line in the optical axis direction of the second microlens.

### Claim 14 (depends on 10)

An image capturing device comprising the image sensor according to claim 10.

### Claim 15 (depends on 14)

The image capturing device according to claim 14, further comprising
a control unit that is connected to the image sensor, wherein
the control unit uses the second signal from the image sensor to perform focus adjustment of an optical system that causes light to enter the image sensor.

### Claim 16 (depends on 2)

An image capturing device comprising the image sensor according to claim 2.

### Claim 17 (depends on 16)

The image capturing device according to claim 16, further comprising:
a control unit that is connected to the image sensor, wherein
the control unit uses the second signal from the image sensor to perform focus adjustment of an optical system that causes light to enter the image sensor.

### Claim 18 (depends on 1)

An image capturing device comprising the image sensor according to claim 1.

### Claim 19 (depends on 18)

The image capturing device according to claim 18, further comprising:
a control unit that is connected to the image sensor, wherein
the control unit uses the second signal from the image sensor to perform focus adjustment of an optical system that causes light to enter the image sensor.
