# US 11,909,375 B2 · Resonance device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,909,375 B2 - Document ID: US11909375B2 - Status: Granted - Kind: B2 - Application number: 17/195,856 - Filed: 2021-03-09 - Published: 2021-06-24 - Granted: 2024-02-20 - Earliest claimed: 2018-10-24 - Assignees: Murata Manufacturing Co., Ltd. - Applicants: Murata Manufacturing Co., Ltd. - Inventors: Keiichi Umeda; Naoto Yatani; Ryota Kawai; Yoshihisa Inoue - Web page: https://patentgrep.com/patent/US11909375B2 ## CPC - H03H 9/02244: {of microelectro-mechanical resonators} - H03H 9/1057: {for microelectro-mechanical devices} - H03H 9/0595: {the holder support and resonator being formed in one body} - H03H 9/17: having a single resonator (crystal tuning forks H03H9/21) - H03H 9/2489: {with more than two fork tines} - H03H 2009/02322: {Material} - H03H 2009/02496: {Horizontal, i.e. parallel to the substrate plane} - H03H 2009/155: {using MEMS techniques} - H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P) ## Abstract A resonance device is provided for reducing the influence on the resonant frequency of the resonance device of the electric charge borne by an insulating film of a frame. The resonance device includes a resonator including a vibration portion and a frame disposed in at least a part of a vicinity of the vibration portion. The frame includes a holding body and an insulating film, with the holding body holding the vibration portion to vibrate and the insulating film being formed above the holding body. A lower cover is provided having a recess forming at least a part of a space in which the vibration portion vibrates. An inner side surface of the insulating film is disposed at a first distance from an inner surface of a side wall defining the recess. ## Claims ### Claim 1 A resonance device comprising: a resonator including a vibration body and a frame disposed around at least a part of the vibration body, the frame including a holding body and an insulating film having an inner side surface that faces the resonator and extends in a thickness direction of the resonance device, with the holding body holding the vibration body, and with the insulating film disposed above the holding body; and a first substrate coupled to the frame and having a recess that forms at least a part of a space in which the vibration body vibrates in operation, the space defined by a side wall that extends in the first substrate and defines a stepped planar surface that extends to the frame, wherein the inner side surface of the insulating film is a first distance outside from an inner surface of the side wall defining the recess, such that the frame does not overlap or coincide with the side wall of the recess in the thickness direction. ### Claim 2 (depends on 1) The resonance device according to claim 1, wherein the vibration body further includes a piezoelectric film that contains a piezoelectric material having a hexagonal wurtzite structure. ### Claim 3 (depends on 2) The resonance device according to claim 2, wherein the frame further includes a piezoelectric film, and wherein the piezoelectric film in the frame and the piezoelectric film in the vibration body are made of an identical material. ### Claim 4 (depends on 3) The resonance device according to claim 3, wherein the vibration body further includes a first electrode and a second electrode that are disposed so as to face each other with the piezoelectric film interposed between the first electrode and the second electrode. ### Claim 5 (depends on 4) The resonance device according to claim 4, wherein at least one of the first electrode and the second electrode comprise a metal having a body-centered cubic structure. ### Claim 6 (depends on 4) The resonance device according to claim 4, wherein an inner side surface of each of the first electrode, the second electrode and the piezoelectric film are disposed at the first distance from the inner surface of the side wall defining the recess relative to a plan view of the first substrate. ### Claim 7 (depends on 1) The resonance device according to claim 1, wherein the vibration body includes a plurality of vibration arms extending from a base thereof. ### Claim 8 (depends on 7) The resonance device according to claim 7, wherein the first substrate includes a projection that is disposed between two adjacent vibration arms of the plurality of vibration arms and that projects from the recess. ### Claim 9 (depends on 1) The resonance device according to claim 1, wherein the holding body is constructed to hold the vibration body to vibrate during operation of the resonance device. ### Claim 10 (depends on 1) The resonance device according to claim 1, wherein the inner side surface of the insulating film is disposed at a second distance equal to or more than the first distance from an inner side surface of the holding body. ### Claim 11 (depends on 1) The resonance device according to claim 1, wherein the first distance extends in a direction orthogonal to the thickness direction of the resonance device and is equal to or more than 5 μm and less than or equal to 50 μm. ### Claim 12 (depends on 1) The resonance device according to claim 1, wherein the frame comprises a frame shape when a main surface of the resonator is viewed in a plan view. ### Claim 13 (depends on 1) The resonance device according to claim 1, further comprising a second substrate disposed so as to face the first substrate with the resonator interposed between the first substrate and the second substrate. ### Claim 14 (depends on 1) The resonance device according to claim 1, wherein a step is disposed in a portion of the frame to define the stepped planar surface, such that an inner side surface of the step substantially coincides with the inner surface of the side wall defining the recess. ### Claim 15 (depends on 1) The resonance device according to claim 1, wherein the vibration body includes a plurality of vibration arms extending from a base thereof, and wherein the first substrate includes a projection that is disposed between two adjacent vibration arms of the plurality of vibration arms and that projects from the recess. ### Claim 16 A resonance device comprising: a first substrate having a main surface with a recess extending therein and having an inner side wall defining the recess in the first substrate; a resonator including a vibration body extending in or above the recess; and a frame coupled to the first substrate and disposed around at least a part of the vibration body and having an inner side surface that faces the resonator and extends in a thickness direction of the resonance device, with the frame including a holding body arm coupled to the vibration body and an insulating film disposed above the holding body, wherein the inner side wall of the recess further defines a stepped planar surface that extends to the frame, and wherein an inner side surface of the insulating film is a first distance outside from the inner side wall defining the recess, such that the frame does not overlap or coincide with the inner side wall of the recess in the thickness direction of the resonance device. ### Claim 17 (depends on 16) The resonance device according to claim 16, wherein the inner side surface of the insulating film and the inner side wall defining the recess each extend in a direction orthogonal to the main surface of the first substrate. ### Claim 18 (depends on 16) The resonance device according to claim 16, wherein the inner side surface of the insulating film is disposed at a second distance equal to or more than the first distance from an inner side surface of the holding body. ### Claim 19 (depends on 16) The resonance device according to claim 16, wherein the first distance extends in a direction orthogonal to the thickness direction of the resonance device and is equal to or more than 5 μm and less than or equal to 50 μm. ### Claim 20 (depends on 16) The resonance device according to claim 16, further comprising a second substrate disposed so as to face the first substrate with the resonator interposed between the first substrate and the second substrate.