# US 11,909,374 B2 · Transversely-excited film bulk acoustic resonators with interdigital transducer configured to reduce diaphragm stress

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- Number: US 11,909,374 B2
- Document ID: US11909374B2
- Status: Granted
- Kind: B2
- Application number: 17/901,743
- Filed: 2022-09-01
- Published: 2023-01-05
- Granted: 2024-02-20
- Earliest claimed: 2020-05-06
- Assignees: Murata Manufacturing Co., Ltd.
- Applicants: Murata Manufacturing Co., Ltd.
- Inventors: Greg Dyer; Bryant Garcia; Doug Jachowski; Robert Hammond; Neal Fenzi; Ryo Wakabayashi
- Web page: https://patentgrep.com/patent/US11909374B2

## CPC

- H03H 9/02228: {Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer}
- H03H 9/02015: {Characteristics of piezoelectric layers, e.g. cutting angles}
- H03H 9/02062: {Details relating to the vibration mode}
- H03H 9/02133: {of stress}
- H03H 9/13: for networks consisting of piezoelectric or electrostrictive materials (for networks using surface acoustic waves H03H9/145)
- H03H 9/174: {Membranes}
- H03H 9/205: having multiple resonators (crystal tuning forks H03H9/21)
- H03H 9/54: comprising resonators of piezoelectric or electrostrictive material (comprising resonators using surface acoustic waves H03H9/64)
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)

## Abstract

Acoustic resonators are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate. The IDT includes: a first busbar and a second busbar disposed on respective portions of the piezoelectric plate other than the diaphragm; a first set of elongate fingers extending from the first bus bar onto the diaphragm; and a second set of elongate fingers extending from the second bus bar onto the diaphragm, the second set of elongate fingers interleaved with the first set of elongate fingers.

## Claims

### Claim 1

An acoustic resonator device comprising:
a substrate;
a single-crystal piezoelectric plate attached directly or by one or more intermediate layers to the substrate and having a portion that forms a diaphragm spanning a cavity in the substrate; and
an interdigital transducer (IDT) at a surface of the piezoelectric plate, the IDT including:
a first busbar and a second busbar disposed on respective portions of the piezoelectric plate other than the diaphragm,
a first set of elongated fingers extending from the first bus bar onto the diaphragm,
a second set of elongated fingers extending from the second bus bar onto the diaphragm, the second set of elongated fingers interleaved with the first set of elongated fingers,
wherein the piezoelectric plate and the first and second sets of elongated fingers are configured such that a radio frequency signal applied between the first and second busbars excites a primary shear acoustic mode in the diaphragm.

### Claim 2 (depends on 1)

The acoustic resonator device of claim 1, further comprising:
a first set of dummy fingers extending from the first busbar onto the diaphragm, each of the first set of dummy fingers aligned with a corresponding one of the second set of elongated fingers; and
a second set of dummy fingers extending from the second busbar onto the diaphragm, each of the second set of dummy fingers aligned with a corresponding one of the first set of elongated fingers.

### Claim 3 (depends on 1)

The acoustic resonator device of claim 1, further comprising:
a second conductor level over the surface of the piezoelectric plate, the second conductor level covering at least portions of the first and second busbars.

### Claim 4 (depends on 3)

The acoustic resonator device of claim 3, wherein the second conductor level covers substantially all of the first and second busbars.

### Claim 5 (depends on 1)

The acoustic resonator device of claim 1, wherein the IDT is part of a conductor pattern.

### Claim 6 (depends on 5)

The acoustic resonator device of claim 5, wherein the piezoelectric plate is one of lithium niobate and lithium tantalate.

### Claim 7 (depends on 6)

The acoustic resonator device of claim 6, wherein the piezoelectric plate comprises a crystallographic orientation that is one of a Z-cut, a rotated Z-cut, and a rotated YX-cut.

### Claim 8

An acoustic resonator device comprising:
a substrate;
a single-crystal piezoelectric plate attached directly or by one or more intermediate layers to the substrate and having a portion that forms a diaphragm spanning a cavity; and
a first conductor level at a surface of the piezoelectric plate, the first conductor level including:
first and second busbars;
a first set of elongated fingers extending from the first bus bar,
a second set of elongated fingers extending from the second bus bar, the second set of elongated fingers interleaved with the first set of elongated fingers,
wherein the first and second busbars are not on the diaphragm, and
wherein the first and second sets of elongated fingers extend from the respective busbars onto the diaphragm, and
wherein one of:
a first distance and a second distance are as small as allowed by expected manufacturing tolerances, or
nominal values of the first distance and the second distance are equal to a worst-case expected misregistration between the cavity and a photomask used to pattern the first conductor level.

### Claim 9 (depends on 8)

The acoustic resonator device of claim 8, wherein:
the first distance, parallel to the surface of the piezoelectric plate, from an edge of the first busbar proximate the cavity to an edge of the cavity proximate the first busbar is greater than or equal to zero, and
the second distance, parallel to the surface of the piezoelectric plate, from an edge of the second busbar proximate the cavity to an edge of the cavity proximate the second busbar is greater than or equal to zero.

### Claim 10 (depends on 8)

The acoustic resonator device of claim 8, further comprising:
a first set of dummy fingers extending from the first busbar onto the diaphragm, each of the first set of dummy fingers aligned with a corresponding one of the second set of elongated fingers; and
a second set of dummy fingers extending from the second busbar onto the diaphragm, each of the second set of dummy fingers aligned with a corresponding one of the first set of elongated fingers.

### Claim 11 (depends on 8)

The acoustic resonator device of claim 8, further comprising:
a second conductor level over the surface of the piezoelectric plate, the second conductor level covering at least portions of the first and second busbars.

### Claim 12 (depends on 11)

The acoustic resonator device of claim 11, wherein the second conductor level covers substantially all of the first and second busbars.

### Claim 13

An acoustic resonator device comprising:
a substrate;
a single-crystal piezoelectric plate attached directly or by one or more intermediate layers to the substrate and having a portion that forms a diaphragm spanning a cavity; and
a first conductor level at a surface of the piezoelectric plate, the first conductor level including:
first and second busbars;
a first set of elongated fingers extending from the first bus bar,
a second set of elongated fingers extending from the second bus bar, the second set of elongated fingers interleaved with the first set of elongated fingers,
wherein the first and second busbars are not on the diaphragm,
wherein the first and second sets of elongated fingers extend from the respective busbars onto the diaphragm, and
wherein the piezoelectric plate and the first and second sets of elongated fingers are configured such that a radio frequency signal applied between the first and second busbars excites a primary shear acoustic mode in the diaphragm.

### Claim 14 (depends on 13)

The acoustic resonator device of claim 13, wherein the piezoelectric plate is one of lithium niobate and lithium tantalate.

### Claim 15 (depends on 14)

The acoustic resonator device of claim 14, wherein the piezoelectric plate comprises a crystallographic orientation that is one of a Z-cut, a rotated Z-cut, and a rotated YX-cut.

### Claim 16

An acoustic resonator device comprising:
a substrate;
a single-crystal piezoelectric plate attached directly or by one or more intermediate layers to the substrate and having a portion that forms a diaphragm spanning a cavity;
first and second busbars on a surface of the piezoelectric plate;
a first set of elongated fingers extending from the first bus bar onto the diaphragm,
a second set of elongated fingers extending from the second bus bar onto the diaphragm, the second set of elongated fingers interleaved with the first set of elongated fingers;
a first set of dummy fingers extending from the first busbar onto the diaphragm, each of the first set of dummy fingers aligned with a corresponding one of the second set of elongated fingers; and
a second set of dummy fingers extending from the second busbar onto the diaphragm, each of the second set of dummy fingers aligned with a corresponding one of the first set of elongated fingers,
wherein an entirety of first bus bar and an entirety of second bus bar are not on the diaphragm.

### Claim 17 (depends on 16)

The acoustic resonator device of claim 16, wherein the first and second sets of dummy fingers are shorter than the first and second sets of elongated fingers.

### Claim 18 (depends on 16)

The acoustic resonator device of claim 16, further comprising:
a second conductor level over the surface of the piezoelectric plate, the second conductor level covering at least portions of the first and second busbars.

### Claim 19 (depends on 18)

The acoustic resonator device of claim 18, wherein the second conductor level covers substantially all of the first and second busbars.

### Claim 20 (depends on 16)

The acoustic resonator device of claim 16, wherein the piezoelectric plate is one of lithium niobate and lithium tantalate, and the piezoelectric plate comprises a crystallographic orientation that is one of a Z-cut, a rotated Z-cut, and a rotated YX-cut.