# US 11,909,373 B2 · Bulk acoustic resonator structures with improved edge frames

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- Number: US 11,909,373 B2
- Document ID: US11909373B2
- Status: Granted
- Kind: B2
- Application number: 17/071,849
- Filed: 2020-10-15
- Published: 2021-04-15
- Granted: 2024-02-20
- Earliest claimed: 2019-10-15
- Assignees: Global Communication Semiconductors, LLC
- Applicants: Global Communication Semiconductors, LLC
- Inventors: Shing-Kuo Wang; Liping D. Hou; Kun-Mao Pan; Andy Chien-Hsiang Chen; Robert B. Stokes
- Web page: https://patentgrep.com/patent/US11909373B2

## CPC

- H03H 9/02015: {Characteristics of piezoelectric layers, e.g. cutting angles}
- H03H 3/02: for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence)
- H03H 9/02102: {of temperature influence (cutting angles H03H9/02015)}
- H03H 9/0211: {of reflections}
- H03H 9/02118: {of lateral leakage between adjacent resonators}
- H03H 9/131: {consisting of a multilayered structure}
- H03H 9/17: having a single resonator (crystal tuning forks H03H9/21)
- H03H 9/173: {Air-gaps}
- H10N 30/50: having a stacked or multilayer structure
- H10N 30/704: {based on piezoelectric or electrostrictive films or coatings}
- H10N 30/853: Ceramic compositions
- H03H 2003/021: {the resonators or networks being of the air-gap type}
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

A bulk acoustic wave (BAW) resonator includes a substrate, a stack over the substrate and including a piezoelectric layer disposed between two electrode layers, and one or more edge frames. The one or more edge frames can be a raised metal frame extending parallel to a periphery of an active region of the stack and has one or more slanted cuts such that the edge frame does not form a closed loop and loss of acoustic energy in the active region through the one or more cuts is reduced, minimized or prevented. Alternatively or additionally, the one or more edge frames include a recessed edge frame in the form of a trench in the piezoelectric layer extending parallel to a boundary of the active region, and may further include a second edge frame formed on the first electrode and embedded in the piezoelectric layer.

## Claims

### Claim 1

A bulk acoustic resonator, comprising:
a substrate;
a stack over the substrate, the stack including a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode; and
an edge frame, wherein:
a region of overlap of the first electrode, the second electrode and the piezoelectric layer forms an active region of the stack;
the edge frame is a raised metal frame extending parallel to a periphery of the active region of the stack and has one or more cuts such that the edge frame does not form a closed loop; and
each respective cut of the one or more cuts is at a respective location along the periphery of the active region and is slanted with reference to a direction of extension of the edge frame at the respective location so as to reduce loss of acoustic energy in the active region through the respective cut.

### Claim 2 (depends on 1)

The bulk acoustic resonator of claim 1, wherein the substrate includes a Bragg reflector or a cavity surrounded by a frame, and wherein:
the stack bridges the cavity and is supported by the frame so that the active region is above the cavity; or
the stack is above the Bragg reflector.

### Claim 3 (depends on 1)

The bulk acoustic resonator of claim 1, wherein a respective cut of the one or more cuts is along a direction that forms a first angle with the direction of extension of the edge frame at the respective location, and wherein the first angle is equal to or less than 45 degrees.

### Claim 4 (depends on 1)

The bulk acoustic resonator of claim 1, wherein a respective cut of the one or more cuts is along a direction that forms a second angle with a direction of propagation of the acoustic energy at the respective location, and wherein the second angle is between 45 degrees and 135 degrees.

### Claim 5 (depends on 1)

The bulk acoustic resonator of claim 1, wherein a width of the edge frame is 0.5-10 μm, and wherein each of the one or more cuts is narrower than a width of the edge frame.

### Claim 6 (depends on 1)

The bulk acoustic resonator of claim 1, wherein the edge frame includes a metal selected from the group consisting of Molybdenum (Mo), Tungsten (W), Gold (Au), and Aluminum (Al), or a dielectric material selected from the group consisting of AIN and SiO2.

### Claim 7 (depends on 1)

The bulk acoustic resonator of claim 1, wherein the edge frame is 200 Angstroms to 1 μm thick.

### Claim 8 (depends on 1)

The bulk acoustic resonator of claim 1, wherein the edge frame is formed on top of one of the first and second electrodes, and wherein the edge frame is inside or outside the active region and closely aligned with the periphery of the active region.

### Claim 9 (depends on 1)

The bulk acoustic resonator of claim 1, wherein the edge frame includes a metal and is formed using a process comprising:
forming a photoresist mask having one or more openings defining one or more areas corresponding to one or more areas to be occupied by the edge frame, the one or more areas having one or more gaps corresponding to the one or more cuts;
depositing the metal in the one or more areas and over the photoresist mask using blanket evaporation; and
lifting off the photoresist via the one or more gaps to remove the metal on the photoresist mask such that the metal deposited in the one or more areas remains to form the edge frame.

### Claim 10

A bulk acoustic resonator, comprising:
a substrate; and
a stack over the substrate, the stack including a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode; wherein:
a region of overlap of the first electrode, the second electrode and the piezoelectric layer forms an active region of the stack;
the piezoelectric layer has a trench extending parallel to a boundary of the active region, the trench has an outer sidewall facing the active region surrounded by the trench, an inner sidewall facing the outer sidewall, and a bottom surface;
the second electrode extends from a top surface of the piezoelectric layer in the active region to cover the inner sidewall, the bottom surface, and the outer sidewall of the trench; and
the trench provides an air gap between a portion of the second electrode on the inner sidewall and a portion of the second electrode on the outer sidewall.

### Claim 11 (depends on 10)

The bulk acoustic resonator of claim 10, wherein the substrate includes a Bragg reflector or a cavity surrounded by a frame, and wherein:
the stack bridges the cavity and is supported by the frame so that the active region is above the cavity; or
the stack is above the Bragg reflector.

### Claim 12 (depends on 10)

The bulk acoustic resonator of claim 10, wherein the trench is inside or outside the active region.

### Claim 13 (depends on 10)

The bulk acoustic resonator of claim 10, wherein a depth of the trench is less than a thickness of the piezoelectric layer, and wherein the trench is 0.5 μm to 10 μm wide.

### Claim 14

A bulk acoustic resonator, comprising:
a substrate;
a stack over the substrate, the stack including a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode; and
an edge frame on the first electrode and protruding into the piezoelectric layer; wherein:
a region of overlap of the first electrode, the second electrode and the piezoelectric layer forms an active region of the stack;
the piezoelectric layer has a trench extending parallel to a boundary of the active region; and
the edge frame extends parallel to the boundary of the active region,
wherein a top of the edge frame is below a top surface of the piezoelectric layer and above a bottom surface of the trench.

### Claim 15 (depends on 14)

The bulk acoustic resonator of claim 14, wherein the substrate includes a Bragg reflector or a cavity surrounded by a frame, and wherein:
the stack bridges the cavity and is supported by the frame so that the active region is above the cavity; or
the stack is above the Bragg reflector.

### Claim 16 (depends on 14)

The bulk acoustic resonator of claim 14, wherein the trench is outside the active region and closely aligned with the boundary of the active region.

### Claim 17 (depends on 16)

The bulk acoustic resonator of claim 16, wherein the edge frame is outside the active region, and wherein a distance between an outer surface of the trench and an inner surface of the edge frame is less than 10 μm.

### Claim 18 (depends on 16)

The bulk acoustic resonator of claim 16, wherein the edge frame is inside the active region, and wherein a distance between an inner surface of the trench and an outer surface of the edge frame is less than 10 μm.

### Claim 19 (depends on 14)

The bulk acoustic resonator of claim 14, wherein a depth of the trench is less than a thickness of the piezoelectric layer, and wherein the trench is 0.5 μm to 10 μm wide.