# US 11,908,731 B2 · Via-first self-aligned interconnect formation process

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- Number: US 11,908,731 B2
- Document ID: US11908731B2
- Status: Granted
- Kind: B2
- Application number: 17/371,556
- Filed: 2021-07-09
- Published: 2022-11-17
- Granted: 2024-02-20
- Earliest claimed: 2021-05-13
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Co., Ltd.
- Inventors: Yu-Tse Lai; Ya Hui Chang
- Web page: https://patentgrep.com/patent/US11908731B2

## CPC

- H10W 20/087: {involving multiple stacked pre-patterned masks}
- H10W 20/089: {using processes for implementing desired shapes or dispositions of the openings, e.g. double patterning}
- H10P 50/73: {using masks for insulating materials}
- H10W 20/069: {by forming self-aligned vias or self-aligned contact plugs}
- H10W 20/075: {of multilayered thin functional dielectric layers}
- H10W 20/088: {involving partial etching of via holes}
- H10W 20/42: Vias, e.g. via plugs
- H10W 20/47: comprising two or more dielectric layers having different properties, e.g. different dielectric constants
- H10W 20/077: {on sidewalls or on top surfaces of conductors (H10W20/076 takes precedence)}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A structure includes a dielectric layer, and a metal line in the dielectric layer. The metal line has a first straight edge and a second straight edge extending in a lengthwise direction of the metal line. The first straight edge and the second straight edge are parallel to each other. A via is underlying and joined to the metal line. The via has a third straight edge underlying and vertically aligned to the first straight edge, and a first curved edge and a second curved edge connecting to opposite ends of the third straight edge.

## Claims

### Claim 1

A method comprising:
forming a dielectric layer over a substrate;
forming a first hard mask over the dielectric layer;
forming a second hard mask over the first hard mask;
etching the second hard mask to form a first opening in the second hard mask, wherein the first opening has a first width;
forming a third hard mask over the second hard mask and filling the first opening;
etching the third hard mask and the first hard mask to form a trench in the third hard mask and a second opening in the first hard mask, wherein the trench comprises a portion directly above the first opening, wherein the first opening is directly above the second opening, and wherein the trench has a second width that is less than the first width of the first opening, and the second opening has a third width that is smaller than or equal to the second width of the trench;
performing a first etching process on the dielectric layer to extend the trench and the second opening into the dielectric layer; and
forming a metal line and a via in the trench and the second opening, respectively.

### Claim 2 (depends on 1)

The method of claim 1, wherein the first opening extends laterally beyond the second opening in a first direction perpendicular to a lengthwise direction of the trench.

### Claim 3 (depends on 2)

The method of claim 2, wherein the first opening extends laterally beyond the second opening in a second direction perpendicular to the lengthwise direction of the trench, and wherein the first direction and the second direction are opposite to each other.

### Claim 4 (depends on 2)

The method of claim 2, wherein the first opening is recessed from a corresponding edge of the trench in a second direction perpendicular to the lengthwise direction of the trench, wherein the first direction and the second direction are opposite to each other.

### Claim 5 (depends on 1)

The method of claim 1 further comprising forming a fourth hard mask over the dielectric layer, wherein the first hard mask is formed over the fourth hard mask, and wherein in the etching the third hard mask and the first hard mask to form the trench, the fourth hard mask is used as an etch stop layer.

### Claim 6 (depends on 5)

The method of claim 5 further comprising, performing a second etching process on the dielectric layer to extend the second opening into a top portion of the dielectric layer and to form a via opening, wherein in the etching the dielectric layer, the fourth hard mask is used as an etching mask.

### Claim 7 (depends on 6)

The method of claim 6 further comprising:
etching the fourth hard mask to extend the trench penetrating through the fourth hard mask, wherein the first etching process on the dielectric layer is performed after both of the second etching process on the dielectric layer and the etching the fourth hard mask are performed.

### Claim 8 (depends on 7)

The method of claim 7, wherein during the etching the fourth hard mask, the dielectric layer is not etched.

### Claim 9 (depends on 1)

The method of claim 1, wherein the metal line comprises a first edge and a second edge extending along a lengthwise direction of the metal line, and wherein the first edge and the second edge are opposite to each other, and wherein the via comprises a third edge and a fourth edge parallel to each other and vertically aligned to the first edge and the second edge, respectively.

### Claim 10 (depends on 1)

The method of claim 1, wherein the metal line comprises a first edge and a second edge extending to a lengthwise direction of the metal line, and wherein the first edge and the second edge are opposite to each other, and wherein the via comprises:
a third edge underlying and vertically aligned to the first edge of the metal line; and
a fourth edge vertically aligned to a position between the first edge and the second edge.

### Claim 11

A method comprising:
etching a dielectric layer to form:
a trench, wherein the dielectric layer comprises a first edge and a second edge facing the trench and parallel to a lengthwise direction of the trench; and
a via opening underlying and connected to the trench, wherein the dielectric layer further comprises:
a third edge and a fourth edge facing the via opening, wherein the third edge and the fourth edge are vertically aligned to the first edge and the second edge, respectively; and
a first curved edge connecting the third edge to the fourth edge; and
filling the trench and the via opening to form a metal line and a via, respectively.

### Claim 12 (depends on 11)

The method of claim 11, wherein the dielectric layer further comprises a second curved edge connecting the third edge to the fourth edge.

### Claim 13 (depends on 12)

The method of claim 12, wherein the first curved edge and the second curved edge fit a same circle.

### Claim 14 (depends on 12)

The method of claim 12, wherein the first curved edge and the second curved edge have a first distance, and the third edge and the fourth edge have a second distance smaller than the first distance.

### Claim 15 (depends on 11)

The method of claim 11, wherein the forming the via opening and the trench comprises:
forming a first pattern of the via opening in a hard mask; and
performing a first etching process to etch the dielectric layer and to form the via opening extending to an intermediate level between a top surface and a bottom surface of the dielectric layer, wherein in the first etching process, the hard mask is used as a first etching mask, and wherein in the first etching process, a second pattern of the trench is formed in the hard mask.

### Claim 16 (depends on 15)

The method of claim 15 further comprising performing a second etching process to:
extend the via opening to the bottom surface of the dielectric layer; and
transfer the second pattern into the dielectric layer to form the trench.

### Claim 17 (depends on 11)

The method of claim 11, wherein the metal line extends laterally beyond the first curved edge in the lengthwise direction.

### Claim 18 (depends on 11)

The method of claim 11, wherein an entirety of the first curved edge is continuously curved.

### Claim 19

A method comprising:
forming a first metal line comprising a first straight edge parallel to a lengthwise direction of the first metal line; and
forming a first via overlapped by the first metal line, wherein an entirety of the first via is directly underlying the first metal line, and the first via comprises:
a first curved edge overlapped by the first metal line; and
a second straight edge vertically aligned to the first straight edge of the first metal line, wherein the second straight edge is joined to the first curved edge.

### Claim 20 (depends on 19)

The method of claim 19 further comprising:
forming a second metal line adjacent to the first metal line, wherein the second metal line comprises a third straight edge parallel to the first straight edge; and
forming a second via overlapped by the second metal line, wherein the second via comprises:
a second curved edge overlapped by the second metal line; and
a fourth straight edge vertically aligned to the third straight edge of the second metal line, wherein the fourth straight edge is joined to the second curved edge.