# US 11,908,728 B2 · System for backside deposition of a substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,908,728 B2 - Document ID: US11908728B2 - Status: Granted - Kind: B2 - Application number: 16/047,711 - Filed: 2018-07-27 - Published: 2019-01-31 - Granted: 2024-02-20 - Earliest claimed: 2017-07-28 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Ronald Nasman; Gerrit J. Leusink; Rodney L. Robison; Hoyoung Kang; Daniel Fulford - Web page: https://patentgrep.com/patent/US11908728B2 ## CPC - C23C 16/04: Coating on selected surface areas, e.g. using masks - H10P 72/7611: {characterised by edge profile or support profile} - C23C 16/4409: {characterised by sealing means} - C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps} - C23C 16/455: characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber - C23C 16/4585: {Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds} - H01J 37/32449: {Gas control, e.g. control of the gas flow} - H10P 72/0441: {Apparatus for sealing, encapsulating, glassing, decapsulating or the like} - C23C 16/505: using radio frequency discharges - H10P 72/0421: {for drying etching} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract Techniques herein include a process chamber for depositing thin films to backside surfaces of wafers to reduce wafer bowing and distortion. A substrate support provides an annular perimeter seal around the bottom and/or side of the wafer which allows the majority of the substrate backside to be exposed to a process environment. A supported wafer separates the chamber into lower and upper chambers that provide different process environments. The lower section of the processing chamber includes deposition hardware configured to apply and remove thin films. The upper section can remain a chemically inert environment, protecting the existing features on the top surface of the wafer. Multiple exhausts and differential pressures are used to prevent deposition gasses from accessing the working surface of a wafer. ## Claims ### Claim 1 An apparatus for depositing films on a backside of a substrate, the apparatus comprising: a processing chamber comprising a top wall, a bottom wall and a side wall extending from the top wall to the bottom wall to enclose the processing chamber, the processing chamber having an upper section and a lower section; a substrate support directly physically coupled to the side wall of the processing chamber and configured to hold a substrate between the upper section and the lower section, the substrate having a front side surface for electrical devices and a backside surface opposite the front side surface, the substrate support having an annular support surface configured to support the substrate along an entire perimeter of the substrate without being in contact with interior regions of the front side surface and without being in contact with interior regions of the backside surface, the substrate support configured to support the substrate with the front side surface facing the upper section and with the backside surface facing the lower section; a first gas distribution unit positioned in the lower section and facing the backside surface of the substrate when the substrate is being held by the substrate support mechanism, the first gas distribution unit configured to direct deposition gas to the backside surface of the substrate for depositing a film on the backside surface of the substrate; and a second gas distribution unit configured to flow inert gas into the upper section of the processing chamber sufficient to create a greater gas pressure in the upper section as compared to the lower section; first and second exhaust ports each provided in the side wall of the processing chamber, wherein the substrate support is physically coupled to the side wall at an area of the side wall between the first and second exhaust ports such that when the substrate is supported by the substrate support, the substrate support and the substrate isolate the upper section from the lower section of the processing chamber, and the first exhaust port is coupled to the upper section of the processing chamber and the second exhaust port is coupled to the lower section; a controller configured to control flow of the deposition gas from the first gas distribution unit for deposition on the backside surface of the substrate, the controller configured to control flow of the inert gas into the upper section and configured to maintain a gas pressure differential between the upper section and lower section sufficient to prevent passage of the deposition gas from the lower section to the front side surface of the substrate when the substrate is resting on the substrate support. ### Claim 2 (depends on 1) The apparatus of claim 1, further comprising a first vacuum exhaust connected to the upper section through the first exhaust port and a second vacuum exhaust connected to the lower section through the second exhaust port, wherein the controller is further configured to control the first vacuum exhaust and the second vacuum exhaust to create a pressure differential between the upper section and the lower section when the substrate is being supported within the processing chamber. ### Claim 3 (depends on 1) The apparatus of claim 1, further comprising a first vacuum exhaust connected to the upper section through the first exhaust port and a second vacuum exhaust connected to the lower section through the second port, wherein the first vacuum exhaust and the second vacuum exhaust are connected to a single vacuum pump. ### Claim 4 (depends on 1) The apparatus of claim 1, further comprising pressure gauges to measure a pressure differential between the upper section and the lower section when the substrate is being supported within the processing chamber, the controller configured to control deflection of the substrate by controlling a first vacuum exhaust and a second vacuum exhaust. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the first gas distribution unit includes a first heating mechanism configured to controllably heat the deposition gas. ### Claim 6 (depends on 1) The apparatus of claim 1, further comprising a heating mechanism positioned in the upper section of the processing chamber, the heating mechanism configured to heat the substrate without contacting the front side surface of the substrate. ### Claim 7 (depends on 6) The apparatus of claim 6, wherein the heating mechanism is moveable towards the front side surface of the substrate and moveable away from the front side surface of the substrate. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein the substrate support is configured to vertically translate the substrate within the processing chamber. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the first gas distribution unit is moveable towards the backside surface of the substrate and moveable away from the backside surface of the substrate. ### Claim 10 (depends on 1) The apparatus of claim 1, further comprising a remote plasma source connected to the first gas distribution unit configured to generate the deposition gas. ### Claim 11 An apparatus for depositing films on a backside of a substrate, the apparatus comprising: a processing chamber having an upper section and a lower section; a substrate support mechanism directly physically coupled to a side wall of the processing chamber and configured to hold a substrate between the upper section and the lower section, the substrate having a front side surface for electrical devices and a backside surface opposite the front side surface, the substrate support mechanism having an annular support surface configured to support the substrate along an entire perimeter of the substrate without being in contact with interior regions of the front side surface and without being in contact with interior regions of the backside surface, the substrate support mechanism configured to hold the substrate with the front side surface facing the upper section and with the backside surface facing the lower section, the substrate support mechanism configured to create a seal at the perimeter of the substrate sufficient to prevent passage of deposition gas from the lower section to the upper section when the substrate is being held by the substrate support mechanism; first and second exhaust ports each provided in the wall of the processing chamber, wherein the substrate support is directly connected to the wall at an area of the wall between the first and second exhaust ports such that the first exhaust port is coupled to the upper section of the processing chamber and the second exhaust port is coupled to the lower section; a gas distribution unit positioned in the lower section of the processing chamber and facing the backside surface of the substrate when the substrate is being held by the substrate support mechanism, the gas distribution unit configured to direct deposition gas to the backside surface of the substrate for depositing a film on the backside surface of the substrate; and a controller configured to control flow of the deposition gas from the gas distribution unit for deposition on the backside surface of the substrate. ### Claim 12 (depends on 11) The apparatus of claim 11, wherein the substrate support mechanism includes a deformable member configured to contact the perimeter of the substrate. ### Claim 13 (depends on 12) The apparatus of claim 12, wherein the deformable member includes an inflatable bladder configured to surround a peripheral edge of the substrate such that when inflated, the inflatable bladder holds the substrate and creates the seal, and when deflated the substrate can be removed from the processing chamber. ### Claim 14 (depends on 12) The apparatus of claim 12, wherein the deformable member includes an O-ring configured to contact the backside surface at a periphery of the backside surface of the substrate. ### Claim 15 (depends on 12) The apparatus of claim 12, wherein the deformable member includes a first O-ring and a second O-ring both configured to contact the backside surface at a periphery of the substrate, wherein the first O-ring has a smaller diameter as compared to the second O-ring such that there is a gap between the first O-ring and the second O-ring. ### Claim 16 (depends on 15) The apparatus of claim 15, wherein the substrate support mechanism includes a vacuum exhaust positioned between the first O-ring and the second O-ring. ### Claim 17 (depends on 15) The apparatus of claim 15, wherein the substrate support mechanism includes lift pins positioned between the first O-ring and the second O-ring configured to raise and lower the substrate from the first O-ring and the second O-ring. ### Claim 18 (depends on 15) The apparatus of claim 15, wherein the first O-ring has a smaller vertical height as compared to the second O-ring. ### Claim 19 (depends on 15) The apparatus of claim 15, wherein the first O-ring is more deformable as compared to the second O-ring. ### Claim 20 An apparatus for depositing films on a backside of a substrate, the apparatus comprising: a processing chamber comprising a top wall, a bottom wall and a side wall extending from the top wall to the bottom wall to enclose the processing chamber, the processing chamber having an upper section and a lower section; a substrate support mechanism directly physically coupled to the side wall of the processing chamber and configured to hold a substrate between the upper section and the lower section, the substrate having a front side surface for electrical devices and a backside surface opposite the front side surface, the substrate support mechanism including a vertically extending portion having an annular support surface configured to support the substrate along an entire perimeter of the substrate without being in contact with interior regions of the front side surface and without being in contact with interior regions of the backside surface, the substrate support mechanism configured to hold the substrate with the front side surface facing the upper section and with the backside surface facing the lower section; a gas distribution unit positioned in the lower section of the processing chamber and facing the backside surface of the substrate when the substrate is being held by the substrate support mechanism, the gas distribution unit configured to direct deposition gas to the backside surface of the substrate for depositing a film on the backside surface of the substrate; an inert gas distribution unit positioned in the upper section of the processing chamber configured to direct inert gas across the perimeter of the substrate; a first gas exhaust positioned on an outer portion of the vertically extending portion of the substrate support mechanism and configured to receive the inert gas from the upper section, and a second gas exhaust at an inner portion of the vertical section of the substrate support mechanism configured to receive the deposition gas from the lower section; wherein the substrate support mechanism is directly physically coupled to the side wall at an area of the side wall between the first and second exhaust such that when the substrate is supported by the substrate support mechanism, the substrate support mechanism and the substrate isolate the upper section from the lower section of the processing chamber; and a controller configured to control flow of the deposition gas from the gas distribution unit for deposition on the backside surface of the substrate and configured to control flow of the inert gas, the controller configured to cause inert gas pressure to exceed deposition gas pressure such that the deposition gas is prevented from reaching the front side surface.