# US 11,908,727 B2 · Support substrates, methods of fabricating semiconductor packages using the same, and methods of fabricating electronic devices using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,908,727 B2 - Document ID: US11908727B2 - Status: Granted - Kind: B2 - Application number: 17/671,022 - Filed: 2022-02-14 - Published: 2022-05-26 - Granted: 2024-02-20 - Earliest claimed: 2017-09-21 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Kunsil Lee; Seung Hwan Lee - Web page: https://patentgrep.com/patent/US11908727B2 ## CPC - H10P 72/74: {using temporarily an auxiliary support} - H10P 54/00: Cutting or separating of wafers, substrates or parts of devices - H10W 46/00: Marks applied to devices, e.g. for alignment or identification - H10W 74/019: {using temporary auxiliary substrates (H10W74/017 takes precedence)} - H10W 74/114: {by a substrate and the encapsulations} - H10P 72/744: {Details of chemical or physical process used for separating the auxiliary support from a device or a wafer} - H10W 46/401: {for identification or tracking} - H10W 70/60: Insulating or insulated package substrates; Interposers; Redistribution layers (leadframes H10W70/40) - H10W 72/0198: {batch processes} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract Disclosed are support substrates, methods of fabricating semiconductor packages using the same, and methods of fabricating electronic devices using the same. The support substrate comprises a main body, and a plurality of first protrusions finely protruding from an upper surface of the main body. The main body and the first protrusions include the same material and are formed as a unitary structure. The first protrusions are spaced apart from each other in first and second directions intersecting each other, when viewed in plan. ## Claims ### Claim 1 A support substrate, comprising: a main body; a support layer is formed on a lower surface of the main body; and a plurality of protrusions protruding from an upper surface of the main body, wherein the main body, the support layer and the plurality of protrusions comprise the same material, and the main body and the plurality of protrusions are formed as a unitary structure, and wherein, in a plan view, the plurality of protrusions are spaced apart from each other in first and second directions to bond the plurality of protrusions with an object provided on the plurality of protrusions with a nail shape. ### Claim 2 (depends on 1) The support substrate of claim 1, further comprising a plurality of second protrusions protruding from a top end of each of the first protrusions, wherein each of the second protrusions has a width less than a width of each of the first protrusions. ### Claim 3 (depends on 1) The support substrate of claim 1, further comprising filler particles distributed in the main body but not present in the first protrusions. ### Claim 4 (depends on 3) The support substrate of claim 3, wherein the filler particles comprise one or more of silica, alumina, titanium oxide, zinc oxide, and manganese oxide. ### Claim 5 (depends on 1) The support substrate of claim 1, wherein the material comprises at least one selected from the group consisting of polydimethyl siloxane, silicon-based rubber, natural rubber, polyisoprene, polysiloxane, polybutadiene, polyacrylamide, polyvinylalcohol, polyacrylic acid, copolymer of polycrylic acid, polyethylene, polypropylene, copolymer of polypropylene, polyester, fluororesin, polyvinylpyrrolidone, carboxyvinylpolymer, poly(hydroxyl methyl cellulose), poly(hydroxyl alkyl methacrylate), copolymer of poly(hydroxyl alkyl methacrylate), poly(ethylene glycol/oxide), copolymer of poly(ethylene glycol/oxide), polyethyleneglycol-polycaprolactone multi-block copolymer, polycaprolactone, copolymer of polycaprolactone, polylactide, copolymer of polylactide, polyglycolide, copolymer of polyglycolide, poly(methyl methacrylate), copolymer of poly(methyl methacrylate), polystyrene, and copolymer of polystyrene. ### Claim 6 (depends on 1) The support substrate of claim 1, wherein a ratio of height to width of each of the first protrusions is 10 or higher. ### Claim 7 (depends on 1) The support substrate of claim 1, wherein the material has heat resistance to a temperature of 200° C. to 350° C. ### Claim 8 (depends on 1) The support substrate of claim 1, wherein the material has light transmittance of about 90% to about 100%. ### Claim 9 (depends on 1) The support substrate of claim 1, wherein the first protrusions aggregate to constitute groups, the groups being spaced apart from each other. ### Claim 10 (depends on 9) The support substrate of claim 9, wherein, in a plan view, the groups have linear or island shapes. ### Claim 11 A support substrate, comprising: a main body; a support layer is formed on a lower surface of the main body; and a plurality of protrusions protruding from an upper surface of the main body, wherein the main body, the support layer and the plurality of protrusions comprise the same material, and the main body and the plurality of protrusions are formed as a unitary structure, and wherein, in a plan view, the plurality of protrusions are spaced apart from each other in first and second directions to bond the plurality of protrusions with an object provided on the plurality of protrusions. ### Claim 12 (depends on 11) The support substrate of claim 11, wherein each of the first protrusions comprises an upper portion and a lower portion, the upper portion having a width greater than a width of the lower portion. ### Claim 13 (depends on 11) The support substrate of claim 11, wherein each of the first protrusions has a cylindrical shape, a polygonal shape, or a spherical shape. ### Claim 14 (depends on 11) The support substrate of claim 11, further comprising a plurality of second protrusions protruding from a top end of each of the first protrusions, wherein each of the second protrusions has a width less than a width of each of the first protrusions. ### Claim 15 (depends on 11) The support substrate of claim 11, further comprising filler particles distributed in the main body but not present in the first protrusions. ### Claim 16 A support substrate, comprising: a main body; a support layer is formed on a lower surface of the main body; and a plurality of protrusions protruding from an upper surface of the main body, wherein the main body and the plurality of protrusions comprise the same material, and the main body and the plurality of protrusions are formed as a unitary structure, and wherein, in a plan view, the plurality of protrusions are spaced apart from each other in first and second directions to bond the plurality of protrusions with an object provided on the plurality of protrusions with a nail shape. ### Claim 17 (depends on 16) The support substrate of claim 16, wherein the support layer has a Young's modulus greater than a Young's modulus of the main body and the first protrusions. ### Claim 18 (depends on 16) The support substrate of claim 16, wherein the support layer has light transmittance of about 90% to about 100%. ### Claim 19 (depends on 16) The support substrate of claim 16, wherein the support layer comprises a material different from a material of the main body, or is formed of a cured portion of the main body. ### Claim 20 (depends on 16) The support substrate of claim 16, further comprising filler particles distributed in the main body but not present in the first protrusions.