# US 11,908,678 B2 · Method of CMP integration for improved optical uniformity in advanced LCOS back-plane

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- Number: US 11,908,678 B2
- Document ID: US11908678B2
- Status: Granted
- Kind: B2
- Application number: 17/149,399
- Filed: 2021-01-14
- Published: 2022-07-14
- Granted: 2024-02-20
- Earliest claimed: 2021-01-14
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Lan Yu; Benjamin D. Briggs; Tyler Sherwood; Raghav Sreenivasan; Joseph Salfelder
- Web page: https://patentgrep.com/patent/US11908678B2

## CPC

- G02F 1/136227: {Through-hole connection of the pixel electrode to the active element through an insulation layer}
- H10P 90/129: {by polishing}
- G02F 1/136277: {formed on a semiconductor substrate, e.g. of silicon}
- H10P 50/282: {of inorganic materials}
- H10P 90/126: {by chemical etching}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Processing methods may be performed to form a filled contact hole in a mirror layer of a semiconductor substrate. The method may include forming a contact hole through a mirror layer of the semiconductor substrate by an etch process. The method may include filling the contact hole with a fill material. A portion of the fill material may overlie the mirror layer. The method may also include removing a portion of the fill material external to the contact hole by chemical mechanical polishing landing on the mirror layer.

## Claims

### Claim 1

A method of forming a filled contact hole in a mirror layer of a semiconductor substrate, the method comprising:
forming a contact hole through a mirror layer of the semiconductor substrate by an etch process;
filling the contact hole with a fill material, wherein a portion of the fill material overlies the mirror layer and the mirror layer is electrically isolated from a metal layer below the mirror layer;
removing a portion of the fill material external to the contact hole by chemical mechanical polishing landing on the mirror layer; and
forming an optical stack overlying the mirror layer and the fill material, wherein the optical stack comprises a distributed Bragg reflector (DBR) that forms an interface with the mirror layer and the fill material, and the DBR is characterized by a reflectance exceeding 95% across a wavelength range of 450 nm-650 nm.

### Claim 2 (depends on 1)

The method of claim 1,
wherein the interface of the DBR with the mirror layer is substantially free of the fill material.

### Claim 3 (depends on 1)

The method of claim 1, wherein the DBR comprises a first layer characterized by a variation in a thickness of the first layer less than or about 30%.

### Claim 4 (depends on 1)

The method of claim 1, wherein the chemical mechanical polishing produces an upper surface of the mirror layer substantially free of the fill material, the chemical mechanical polishing being characterized by a planarization length less than or about 5 mm.

### Claim 5 (depends on 1)

The method of claim 1, wherein the chemical mechanical polishing uses a down force exceeding or about 0.1 PSI, a rotation rate exceeding or about 15 RPM, and a slurry flow rate exceeding or about 50 mL/min.

### Claim 6 (depends on 1)

The method of claim 1, wherein the chemical mechanical polishing uses a slurry comprising silica particles suspended in a solvent comprising de-ionized water, the particles characterized by an average diameter less than or about 1 μm.

### Claim 7 (depends on 6)

The method of claim 6, wherein the chemical mechanical polishing uses an acid dissolved in the solvent.

### Claim 8

A method of forming a filled contact hole on a mirror layer of a semiconductor substrate, the method comprising:
forming a contact hole through a mirror layer of the semiconductor substrate by an etch process;
filling the contact hole with a fill material, wherein a portion of the fill material extends over the mirror layer and the mirror layer is electrically isolated from a metal layer below the mirror laver;
removing a portion of the fill material external to the contact hole by a removal process selective to the fill material;
polishing an upper surface of the mirror layer to a surface roughness less than 10 nm; and
forming an optical stack overlying the mirror layer and the fill material, wherein the optical stack comprises a distributed Bragg reflector (DBR) that forms an interface with the mirror layer and the fill material, and the DBR is characterized by a reflectance exceeding 95% across a wavelength range of 450 nm-650 nm.

### Claim 9 (depends on 8)

The method of claim 8, wherein the interface of the DBR with the mirror layer is substantially free of the fill material.

### Claim 10 (depends on 8)

The method of claim 8, wherein polishing the upper surface of the mirror layer comprises chemical mechanical polishing characterized by a planarization length less than 5 mm.

### Claim 11 (depends on 10)

The method of claim 10, wherein the chemical mechanical polishing uses a down force exceeding or about 0.1 PSI, a rotation rate exceeding or about 10 RPM, and a slurry flow rate exceeding or about 50 mL/min.

### Claim 12 (depends on 10)

The method of claim 10, wherein the chemical mechanical polishing uses a slurry comprising cerium oxide particles suspended in a solvent comprising de-ionized water and an acid, the particles characterized by an average diameter less than 1000 nm.

### Claim 13 (depends on 12)

The method of claim 12, wherein the chemical mechanical polishing uses an acid dissolved in the solvent.

### Claim 14

A semiconductor structure comprising:
a semiconductor substrate;
a metal layer overlying the semiconductor substrate;
a spacer layer overlying the metal layer;
a mirror layer overlying the spacer layer;
a fill material filling a contact hole formed in the mirror layer, the fill material substantially level with an upper surface of the mirror layer, the upper surface of the mirror layer characterized by an average roughness less than 5 nm; and
an optical stack overlying the mirror layer and the fill material, wherein the optical stack comprises a distributed Bragg reflector (DBR) that forms an interface with the mirror layer and the fill material, and the DBR is characterized by a reflectance exceeding 95% across a wavelength range of 450 nm-650 nm.

### Claim 15 (depends on 14)

The semiconductor structure of claim 14, wherein the DBR comprises a first layer characterized by a variation in a thickness of the first layer less than or about 30%.

### Claim 16 (depends on 14)

The semiconductor structure of claim 14, wherein the interface is substantially free of the fill material.

### Claim 17 (depends on 14)

The semiconductor structure of claim 14, wherein the contact hole extends to the metal layer, the fill material contacting the metal layer.