# US 11,908,667 B2 · Ceramic susceptor

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- Number: US 11,908,667 B2
- Document ID: US11908667B2
- Status: Granted
- Kind: B2
- Application number: 17/659,832
- Filed: 2022-04-19
- Published: 2022-07-28
- Granted: 2024-02-20
- Earliest claimed: 2020-12-31
- Assignees: MiCo Ceramics Ltd.
- Applicants: Mico Ceramics Ltd.
- Inventors: Ju Sung Lee; Haneum Bae
- Web page: https://patentgrep.com/patent/US11908667B2

## CPC

- H01J 37/32724: {Temperature}
- C23C 16/4586: {Elements in the interior of the support, e.g. electrodes, heating or cooling devices}
- C23C 16/52: Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)}
- H01J 37/32082: {Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence)}
- H01L 21/6833
- H01J 2237/3321: CVD [Chemical Vapor Deposition]
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01L

## Abstract

The present disclosure relates to a ceramic susceptor. The ceramic susceptor of the present disclosure includes: an insulating plate on which a high-frequency electrode is disposed; a shaft connected to the insulating plate; a connection mount connected to a longitudinal end of the shaft; a first rod and a second rod, which are connected to the high-frequency electrode, pass through the longitudinal end of the shaft, and extend to the connection mount; and a connection member disposed in the connection mount, wherein the connection member connects the first rod to the second rod.

## Claims

### Claim 1

A ceramic susceptor comprising:
an insulating plate on which a high-frequency electrode is disposed;
a shaft having one end connected to the insulating plate and having a separation plate at the other end;
a connection mount having an upper portion connected to the other end of the shaft;
a first rod and a second rod connected to the high-frequency electrode and extending into the connection mount through the separation plate at the other end of the shaft;
a connection member disposed in the connection mount and connecting the first rod and the second rod extending into the connection mount to a draw-in rod; and
a cooling structure configured to cool the connection mount;
wherein the connection mount comprises a fixing plate configured to fix the draw-in rod, the draw-in rod passes through the fixing plate and is exposed outside through the connection mount,
wherein the connection member includes a first hole and a second hole for fixing the first rod and the second rod to one side of the connection member, respectively, and a third hole for fixing the draw-in rod to the other side of the connection member,
wherein the first rod and the second rod are for branching of an electric current, and
wherein the fixing plate is provided in the inner space of the connection mount, and is spaced a predetermined distance from an upper part of the connection mount through which the first rod and the second rod pass, and a lower part of the connection mount through which the draw-in rod passes.

### Claim 2 (depends on 1)

The ceramic susceptor of claim 1, wherein the high-frequency electrode comprises a first high-frequency electrode and a second high-frequency electrode, and
the first rod is electrically connected to the first high-frequency electrode, and the second rod is electrically connected to the second high-frequency electrode.

### Claim 3 (depends on 1)

The ceramic susceptor of claim 1, further comprising a temperature sensor configured to measure temperature inside the connection mount.

### Claim 4 (depends on 1)

The ceramic susceptor of claim 1,
wherein a space between the upper portion of the connection mount and the separation plate is sealed, and
wherein the connection mount comprises an inlet and an outlet for circulation of a cooling medium, and the draw-in rod is exposed outside through the sealed connection mount.