Scanning electron microscope device and electron beam inspection apparatus

A scanning electron microscope device for a sample to be detected, which is configured to project an electron beam to a surface of the sample to generate backscattered electrons and secondary electrons, comprising:

• an electron beam source configured to emit along an optical axis thereof the electron beam;
• a deflection mechanism, comprising:
• a first deflector located downstream of the electron beam source;
• and
• a second deflector located downstream of the first deflector;
• and
• an objective lens assembly, comprising:
• an excitation coil which is energized to create a magnetic field;
• and
• a magnetic yoke, formed by a magnetizer material as a housing which opens towards the sample, and comprises:
• a hollow body defining an internal chamber where the excitation coil is accommodated;
• and
• at least one inclined portion extending inward from the hollow body at an angle with reference to the hollow body and directing towards the optical axis, with an end of the at least one inclined portion being formed into a pole piece,
• wherein the deflection mechanism further comprises a third deflector located between the second deflector and the objective lens assembly and disposed in an opening delimited and circumscribed by the pole piece, and each of the first deflector, the second deflector and the third deflector is an electrostatic deflector, and
• wherein the scanning electron microscope device further comprises a shielding plate provided below the third deflector, with an orthographic projection of the third deflector on a plane perpendicular to the optical axis completely falling in an orthographic projection of the shielding plate on the plane perpendicular to the optical axis.